Testing rotating errors of axis with reversal method

ZHANG Jing-he; FENG Xiao-guo; LIU Wei

doi:null

您当前的位置：

首页 >

文章列表页 >

Testing rotating errors of axis with reversal method

更新时间：2020-08-12

- Testing rotating errors of axis with reversal method
- Optics and Precision Engineering Vol. 9, Issue 2, Pages: 155-158(2001)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH133.35
- Received：07 September 2000，
  
  Revised：30 September 2000，
  
  Published Online：15 April 2001，
  
  Published：15 April 2001
- 稿件说明：
移动端阅览
张景和, 冯晓国, 刘伟. 用反向法测轴系回转误差[J]. 光学精密工程, 2001,(2): 155-158

ZHANG Jing-he, FENG Xiao-guo, LIU Wei . Testing rotating errors of axis with reversal method[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 155-158
张景和, 冯晓国, 刘伟. 用反向法测轴系回转误差[J]. 光学精密工程, 2001,(2): 155-158 DOI：

ZHANG Jing-he, FENG Xiao-guo, LIU Wei . Testing rotating errors of axis with reversal method[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 155-158 DOI：

摘要

阐述了用反向法对高精度轴系回转误差测试的过程及测试的一些结果。对轴系各种测试方法作了简单介绍

重点介绍了“二元光学元件激光直接写入设备”轴系回转误差的测试过程。测得轴系的回转误差为0.018μm。对反向法测试原理、误差分离的数学方法及实际应用

进行了描述。总结了影响测量结果重复性的几个因素。测试结果证明

此方法简单实用、结果准确

适合于精密机械设计人员使用。

Abstract

In addition to describing a course of testing rotating error of high precision axis with reversal method

the paper also introduces all kinds of testing methods

especially the testing process of the rotating error of axis in manufacturing laser direct writing of binary optics elements. The rotating error of the axis measured is 0.018μm. This paper gives the testing theory

the way to separate the error and the practical applications in detail. Several factors that affect the reduplication of consequence are summarized. Finally

the authors conclude that the method is not only simple and practical

but also very accurate

being suitable for mechanists.

关键词

Keywords

references

李志杰,蔡鹤皋.主轴回转运动精度的评定误差[J].计量学报,1993(4):297-301.

卓兴红.三测头同方位同步测量实时分离轴系回转误差[J].计量学报,2000(2):106-112.

张华容.机床主轴回转精度的数学描述和分析[J].机械工程学报,1982(18)4:65-73.

蔡鹤皋,等.回转运动误差的精确测试理论及方法[J].机械工程学报,1988(24)2:84-89.

刘伟. 圆度仪与V形法测量轴圆度的比较[J].光学精密工程,1999(7)5:135-137.

Views

441

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Spindle radial motion error measurement using a circular grating and a autocollimator

Development of mosaic technology for large-size reflective gratings

Fabrication of large aspheric mirror using multi-mode polishing based on error separation

Elimination of wavefront aberration introduced from large aperture collimator in detection of large optical device

Self-calibration technology in measuring error separation of imaging instrument

Related Author

Xiao-dong WANG

Li LIU

Xiu-peng HAO

Zhi-feng LOU

Guo-jun YANG

Hai-li YU

Xiao-tian LI

Shan-wen ZHANG

Related Institution

College of Mechanical Engineering, Dalian University of Technology

University of Chinese Academy of Sciences

Optical Technology Research Center, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

College of Metrology & Measurement Engineering, China Jiliang University

National Institute of Metrology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰