Manufacturing of high efficient holographic diffraction gratings

ZHAO Bo; QI Xiang-dong

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Manufacturing of high efficient holographic diffraction gratings

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- Manufacturing of high efficient holographic diffraction gratings
- Optics and Precision Engineering Vol. 9, Issue 2, Pages: 109-114(2001)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 北京大学遥感与地理信息系统研究所北京,100871
- 作者简介：
- 基金信息：
- DOI：
  CLC： O436.1
- Received：21 August 2000，
  
  Revised：25 September 2000，
  
  Published Online：15 April 2001，
  
  Published：15 April 2001
- 稿件说明：
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赵博, 齐向东. 高效平面全息衍射光栅的获取方法[J]. 光学精密工程, 2001,(2): 109-114

ZHAO Bo, QI Xiang-dong . Manufacturing of high efficient holographic diffraction gratings[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 109-114
赵博, 齐向东. 高效平面全息衍射光栅的获取方法[J]. 光学精密工程, 2001,(2): 109-114 DOI：

ZHAO Bo, QI Xiang-dong . Manufacturing of high efficient holographic diffraction gratings[J]. Editorial Office of Optics and Precision Engineering, 2001,(2): 109-114 DOI：

摘要

从全息衍射光栅的制作原理出发

介绍了全息光栅的主要制作方法

并与刻划光栅对比分析了全息衍射光栅的诸多优点。通过利用光栅设计的耦合波理论对全息衍射光栅槽型、槽深及槽间距等进行了优化设计

同时利用离子束刻蚀技术获得了高效率全息光栅。文中全面分析了制作高效率平面全息光栅的各项关键技术。

Abstract

In light of the manufacturing principles of holographic diffraction gratings

the paper presents a main method of manufacturing the holographic gratings. In comparison with ruling gratings

the holographic diffraction gratings have many advantages. Using the coupling wave theory and ion etching

the design and efficiency of the gratings have been optimized and improved

respectively. The paper also gives various key technologies in manufacturing high efficient holographic diffraction gratings in detail.

关键词

Keywords

references

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