Improving angle-measuring precision and resolution of photoelectric rotary encoders using diffraction interference technology

KONG Zhi-yong; ZHAO Hong-ying; XIONG Wen-zhuo; AI Hua

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Improving angle-measuring precision and resolution of photoelectric rotary encoders using diffraction interference technology

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- Improving angle-measuring precision and resolution of photoelectric rotary encoders using diffraction interference technology
- Optics and Precision Engineering Vol. 9, Issue 3, Pages: 260-265(2001)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN366
- Received：07 March 2001，
  
  Revised：23 March 2001，
  
  Published Online：15 June 2001，
  
  Published：15 June 2001
- 稿件说明：
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孔智勇, 赵红颖, 熊文卓, 艾华. 采用衍射、干涉技术提高光电轴角编码器的测角精度和分辨率[J]. 光学精密工程, 2001,(3): 260-265

KONG Zhi-yong, ZHAO Hong-ying, XIONG Wen-zhuo, AI Hua . Improving angle-measuring precision and resolution of photoelectric rotary encoders using diffraction interference technology[J]. Editorial Office of Optics and Precision Engineering, 2001,(3): 260-265
孔智勇, 赵红颖, 熊文卓, 艾华. 采用衍射、干涉技术提高光电轴角编码器的测角精度和分辨率[J]. 光学精密工程, 2001,(3): 260-265 DOI：

KONG Zhi-yong, ZHAO Hong-ying, XIONG Wen-zhuo, AI Hua . Improving angle-measuring precision and resolution of photoelectric rotary encoders using diffraction interference technology[J]. Editorial Office of Optics and Precision Engineering, 2001,(3): 260-265 DOI：

摘要

光电轴角编码器广泛应用于精密角位置的测量、数控及数显系统中

是国内外研究的热点.采用衍射、干涉技术的光电轴角编码器(简称激光编码器)具有结构紧凑、小型化;分辨率和测角精度高;响应频率高等优点.通过对几种激光编码器的成功方案的深入分析

阐述了这项技术的最新进展和所面临的问题.

Abstract

Photoelectric rotary encoder

which is also called photoelectric angle position sensor

is a kind of digital angle measuring device combining with optics

mechanics and electronics. The photoelectric rotary encoder has been used widely in the systems of fine angel position measurement

digital control and digital display. The photoelectric rotary encoders using diffraction interference technology (shortened form laser encoder) is characterized by compact structure

miniaturization

high accuracy and high resolution

and high frequency response. This paper analyzes a few kinds of successful schemes of laser encoders

and also expounds new headway and the technology problems concerned.words :photoelectricrotaryencoders;diffracti

关键词

Keywords

references

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