Quantitative surface topography determination by differential interference contrast microscopy

XU Yi; XU Yu-xian; CAI Xin; HUI Mei

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Quantitative surface topography determination by differential interference contrast microscopy

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- Quantitative surface topography determination by differential interference contrast microscopy
- Optics and Precision Engineering Vol. 9, Issue 3, Pages: 226-229(2001)
- 作者机构：
  
  1. 清华大学精密仪器系北京,100084
  2. 中国科学院西安光机所, 陕西西安, 710068
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH742
- Received：20 January 2001，
  
  Revised：28 February 2001，
  
  Published Online：15 June 2001，
  
  Published：15 June 2001
- 稿件说明：
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许谊, 徐毓娴, 惠梅, 蔡昕. 微分相衬干涉显微镜定量测量表面形貌[J]. 光学精密工程, 2001,(3): 226-229

XU Yi, XU Yu-xian, CAI Xin, HUI Mei . Quantitative surface topography determination by differential interference contrast microscopy[J]. Editorial Office of Optics and Precision Engineering, 2001,(3): 226-229
许谊, 徐毓娴, 惠梅, 蔡昕. 微分相衬干涉显微镜定量测量表面形貌[J]. 光学精密工程, 2001,(3): 226-229 DOI：

XU Yi, XU Yu-xian, CAI Xin, HUI Mei . Quantitative surface topography determination by differential interference contrast microscopy[J]. Editorial Office of Optics and Precision Engineering, 2001,(3): 226-229 DOI：

摘要

改进了用于定量测量样品表面形貌的微分相衬干涉显微镜系统

对系统中由Nomarski棱镜引起的相位差β的消零工作提出了一种新的方法

实验证明是有效可靠的

并且对样品表面三维形貌重构、截面轮廓比对及系统的测量精度进行了实验研究.

Abstract

Quantitative surface topography determination by differential interference contrast microscope system is partly exploited in this paper. A new method of minishing phase difference β to zero caused by Nomarski prism in the system is effective and reliable. The reconstruction of three-dimensional surface topography of the sample

comparison of profile curves

and the system measuring accuracy are investigated in detail.

关键词

Keywords

references

陈峻堂.微分干涉相衬显微术[J].光学仪器,1984,6(1): 6-15.

高宏,薛实福,等.超光滑表面轮廓的绝对测量[J].计量学报,1995,16(2):103-107.

Barty A, Nugent K A, Paganin D, et al. Quantitative optical phase microscopy[J]. Opt. Lett,1998,23(11):817-819.

Van Munster E B, Van Vliet L J,Aten J A. Reconstruction of optical path length distributions from images obtained by a wide-field differential interference contrast microscope[J]. Journal of Microscopy, 1997,188(2): 149-157.

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