The state of the art of micro spectrometers

JU Hui; WU Yi-Hui

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The state of the art of micro spectrometers

更新时间：2020-08-12

- The state of the art of micro spectrometers
- Optics and Precision Engineering Vol. 9, Issue 4, Pages: 372-376(2001)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN744.1
- Received：16 January 2001，
  
  Revised：21 July 2001，
  
  Published Online：15 August 2001，
  
  Published：15 August 2001
- 稿件说明：
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鞠挥, 吴一辉. 微型光谱仪的发展现状[J]. 光学精密工程, 2001,(4): 372-376

JU Hui, WU Yi-hui. The state of the art of micro spectrometers[J]. Editorial Office of Optics and Precision Engineering, 2001,(4): 372-376
鞠挥, 吴一辉. 微型光谱仪的发展现状[J]. 光学精密工程, 2001,(4): 372-376 DOI：

JU Hui, WU Yi-hui. The state of the art of micro spectrometers[J]. Editorial Office of Optics and Precision Engineering, 2001,(4): 372-376 DOI：

摘要

光谱仪是种类繁多、应用极为广泛的一种理化分析仪器

微加工技术的发展和MEMS(微机电系统)、MOEMS(微光机电系统)技术的出现为其微小型化提供了可能性

本文着重就采用新型滤光技术的微型光谱仪、利用光纤制作的微型光谱仪以及集成式光谱仪进行介绍.光谱仪的微小型化是我国微型仪器的一个重要发展方向.

Abstract

Spectrometer is an instrument for physical and chemical analysistry

and is widely used in many fields. The development of micromachining and the MOEMS technology make it possible to be miniaturized. The paper mainly describes the micro spectromets with novel filtering technique

optical fiber based integrated micro-spectrome-ters and integrated spectrometers. The miniaturization of spectrometers is one of the important developing trends for micro-instruments of our country.

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references

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