Research on Reaction-bonded SiC for Optical Application

WANG Jun-lin; XU Chang-shan

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Research on Reaction-bonded SiC for Optical Application

更新时间：2020-08-12

- Research on Reaction-bonded SiC for Optical Application
- Optics and Precision Engineering Vol. 9, Issue 5, Pages: 478-482(2001)
- 作者机构：
  
  Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130022, China
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH703
- Received：29 August 2001，
  
  Revised：17 September 2001，
  
  Published Online：15 October 2001，
  
  Published：15 October 2001
- 稿件说明：
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WANG Jun-lin, XU Chang-shan . Research on Reaction-bonded SiC for Optical Application[J]. 光学精密工程, 2001,(5): 478-482

WANG Jun-lin, XU Chang-shan . Research on Reaction-bonded SiC for Optical Application[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 478-482
WANG Jun-lin, XU Chang-shan . Research on Reaction-bonded SiC for Optical Application[J]. 光学精密工程, 2001,(5): 478-482 DOI：

WANG Jun-lin, XU Chang-shan . Research on Reaction-bonded SiC for Optical Application[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 478-482 DOI：

摘要

Ultrasonic treatment technology is utilized to fabricate RBSiC

and a new polishing technology-float polishing is developed to process RBSiC. SEM

XRD

AFM. Raman scattering and WYCO are applied to measure and analyze the RBSiC and the polished surface. The results indicate that the ultrasonic treatment decreases the content of the free Si and makes RBSiC denser and more uniformity. The float polishing technology is suitable for polishing RBSiC effectively.

Abstract

Ultrasonic treatment technology is utilized to fabricate RBSiC

and a new polishing technology-float polishing is developed to process RBSiC. SEM

XRD

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