Synchrotron Radiation Lithography and MEMS Technique at NSRL

LIU Gang; TIAN Yang-chao

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Synchrotron Radiation Lithography and MEMS Technique at NSRL

更新时间：2020-08-12

- Synchrotron Radiation Lithography and MEMS Technique at NSRL
- Optics and Precision Engineering Vol. 9, Issue 5, Pages: 455-457(2001)
- 作者机构：
  
  National Synchrotron Radiation Laboratory, University of Science and Technology of China Hefei,China,230029
- 作者简介：
- 基金信息：
- DOI：
  CLC： TL544
- Received：29 August 2001，
  
  Revised：25 September 2001，
  
  Published Online：15 October 2001，
  
  Published：15 October 2001
- 稿件说明：
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LIU Gang, TIAN Yang-chao . Synchrotron Radiation Lithography and MEMS Technique at NSRL[J]. 光学精密工程, 2001,(5): 455-457

LIU Gang, TIAN Yang-chao . Synchrotron Radiation Lithography and MEMS Technique at NSRL[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 455-457
LIU Gang, TIAN Yang-chao . Synchrotron Radiation Lithography and MEMS Technique at NSRL[J]. 光学精密工程, 2001,(5): 455-457 DOI：

LIU Gang, TIAN Yang-chao . Synchrotron Radiation Lithography and MEMS Technique at NSRL[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 455-457 DOI：

摘要

Two beamlines and stations for soft X-ray lithography and hard X-ray lithography at NSRL are presented. Synchrotron radiation lithography (SRL) and mask techniques are developed

and the micro-electro-mechanical systems (MEMS) techniques are also investigated at NSRL. In this paper

some results based on SRL and MEMS techniques are reported

and sub-micron and high aspect ratio microstructures are given. Some micro-devices

such as microreactors are fabricated at NSRL.

Abstract

Two beamlines and stations for soft X-ray lithography and hard X-ray lithography at NSRL are presented. Synchrotron radiation lithography (SRL) and mask techniques are developed

and the micro-electro-mechanical systems (MEMS) techniques are also investigated at NSRL. In this paper

some results based on SRL and MEMS techniques are reported

and sub-micron and high aspect ratio microstructures are given. Some micro-devices

such as microreactors are fabricated at NSRL.

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Related Institution

Department of Precision Mechanical Engineering， Shanghai University

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Key Laboratory of MEMS of Ministry of Education, Southeast University

Graduate School of the Chinese Academy of Sciences

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