Technical Problems in Digital Phase-stepping Flatness Interferometers

YU Ying-Jie; WEI Chun-long; CHEN Ming-Yi

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Technical Problems in Digital Phase-stepping Flatness Interferometers

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- Technical Problems in Digital Phase-stepping Flatness Interferometers
- Optics and Precision Engineering Vol. 9, Issue 6, Pages: 584-587(2001)
- 作者机构：
  
  上海大学精密机械工程系, 上海, 200072
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH744.3
- Received：20 August 2001，
  
  Revised：01 September 2001，
  
  Published Online：15 December 2001，
  
  Published：15 December 2001
- 稿件说明：
移动端阅览
于瀛洁, 韦春龙, 陈明仪. 移相式数字波面干涉仪中的几个技术问题[J]. 光学精密工程, 2001,(6): 584-587

YU Ying-jie, WEI Chun-long, CHEN Ming-yi . Technical Problems in Digital Phase-stepping Flatness Interferometers[J]. Editorial Office of Optics and Precision Engineering, 2001,(6): 584-587
于瀛洁, 韦春龙, 陈明仪. 移相式数字波面干涉仪中的几个技术问题[J]. 光学精密工程, 2001,(6): 584-587 DOI：

YU Ying-jie, WEI Chun-long, CHEN Ming-yi . Technical Problems in Digital Phase-stepping Flatness Interferometers[J]. Editorial Office of Optics and Precision Engineering, 2001,(6): 584-587 DOI：

摘要

光学件波面测量在光学加工业中有着大量的需求

近年来相关测量技术发展非常迅速

其中移相技术是较典型的代表

发展日趋成熟并得到了广泛应用.以PG-15型平面干涉仪为硬件基础

采用移相技术

解决了其中移相值标定、相位解调、误差处理中的难点

研制了数字波面干涉仪.对干涉仪中的这几个关键技术问题进行了讨论

并给出了相应的解决方法.

Abstract

Flatness measurement of optical workpieces in optical manufacturing is very important. In recent years

the relative techniques have developed rapidly

expecially phase stepping technique

which has become mature gradually and has been applied widely. The paper utilizes the flatness interferometer

mode PG 15

as a basic hardware to design a digital flatness phase stepping interferometer. In the course of designing

a few of key difficulties had been overcome

including phase step calibration

phase unwrapping and error processing. The paper discusses these key techniques and presents their solving methods in detail.

关键词

Keywords

references

Malacara Daniel, Servin Manuel, Malacara Zacarias. Interferogram analysis for optical testing[M]. Marcel Dekker. Inc, 1998.

Wei Chunlong, Chen Mingyi. General phase-stepping algorithm with automatic calibration of phase steps[J]. Opt. Eng, 1999,38(8):1357-1360.

郭红卫,陈明仪,韦春龙.基于一阶泰勒展开的迭代最小二乘相移新算法[J].光学学报,2001,21(1):72-74.

Ghiglia Demmos C, Pritt Mark D. Two-dimensional phase unwrapping[M]. John Wiley & Sons.Inc,1998.

Ghiglia D C, Romero L A. Robust two-dimensional weighted and unweighted phase unwrapping that uses fast transforms and iterative methods[J]. J.Opt. Soc. Am. A, 1994,11:107-117.

Pritt M D. Phase unwrapping by means of multigrid techqiues for interferometric SAR[J]. IEEE Transactions on Geoscience and Remote Sensing, 1996,32(3):738-738.

Schwider J, Dresel T, Manzke B. Some considerations of reduction of reference phase errors in phase-stepping interferometry[J]. Appl. Opt,1999,38(4):655-659.

Hariharan Parameswaran. Phase-shifting interferometry:minimization of systematic errors[J]. Opt. Eng,2000,39(4):967-969.

Yu Yingjie, Wei Chunlong. Effective error reduction method in phase-shifting interferometer[J]. SPIE,2000,4110:283-290.

李国栋,韦春龙,于瀛洁,等.图形域干涉图中的相位解包裹[J].光学精密工程,2000,8(5):473-477.

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