Study of Micro Mechanical Size Inspection Technology by Microscope Precision Digital Image

WANG Xiang-jun; WANG Feng

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Study of Micro Mechanical Size Inspection Technology by Microscope Precision Digital Image

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- Study of Micro Mechanical Size Inspection Technology by Microscope Precision Digital Image
- Optics and Precision Engineering Vol. 9, Issue 6, Pages: 511-513(2001)
- 作者机构：
  
  天津大学精密仪器与光电子工程学院天津大学测试计量技术及仪器国家重点实验室, 天津大学精密仪器与光电子工程学院天津大学测试计量技术及仪器国家重点实验室天津,300072
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG806
- Received：20 August 2001，
  
  Revised：29 September 2001，
  
  Published Online：15 December 2001，
  
  Published：15 December 2001
- 稿件说明：
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王向军, 王峰. 显微精密成像与微型机械尺寸检测技术[J]. 光学精密工程, 2001,(6): 511-513

WANG Xiang-jun, WANG Feng . Study of Micro Mechanical Size Inspection Technology by Microscope Precision Digital Image[J]. Editorial Office of Optics and Precision Engineering, 2001,(6): 511-513
王向军, 王峰. 显微精密成像与微型机械尺寸检测技术[J]. 光学精密工程, 2001,(6): 511-513 DOI：

WANG Xiang-jun, WANG Feng . Study of Micro Mechanical Size Inspection Technology by Microscope Precision Digital Image[J]. Editorial Office of Optics and Precision Engineering, 2001,(6): 511-513 DOI：

摘要

讨论了利用半导体或纳米制备技术和手段提供的物理空间晶格作为显微成像基准

对显微视觉成像系统的四维空间畸变进行提取、修正和实时标定

以实现视觉检测系统的精密数字成像

为微机械量、微几何量提供检测、评价和计量手段.对若干问题进行了详细的讨论

显微视觉检测是微机械量微几何量计量中最有效的方法之一

而精密数字成像是必须解决的问题之一.研究精密数字成像是视觉检测技术向微观检测领域发展所必须解决的科研课题.对微机械量和微几何量计量有重要意义

Abstract

The microscope precision digital imaging which is obtained by means of a standard object made by means of semiconductor manufacturing technology or nanotechnology approach

the extraction of four-dimensional space error of microscope vision image system

and the real-time correction and calibration to achieve precision digital imaging are discussed. An example is given for inspection of a micro structure size of 7μm. It is an important research subject for the development and application of vision inspection technology in micro-mechanical size ranging from submicrometer to 10mm.

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references

Wilkening Dr G. Measuring methods for the determination of geometrical quantities of micro parts[A]. Proceedings of Symposium on Nano-metrology in Precision Engineering[C],1998,11(24):68-75.

Edmundson,Kenneth.Practical evaluation of sequential estimation for vision metrology[J]. ISPRS Journal of Photogrammetry and Remote Sensing, 1998,53(5):272-285.

Christopher C.Modeling errors for dimensional inspection using active vision[J]. Robotics and Computer Integrated Manufacturing, 1999,15(3):23-37.

胡晓唐. 纳米级台阶实物基准的研制和标定[A]. Proceedings of Symposium on Nano-metrology in Precision Engineering[C].HK, 1998,144-148.

于波,王立鼎,刘立新.电视显微立体成像系统中的闪烁问题及解决方法探讨[J].光学精密工程,1998,6(1):53-57.

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