Measurement of the line-density of a varied-line-space grating by Moir? fringe

ZHU Xiang-bing; HE Shi-ping; FU Shao-jun; XU Xiang-dong; CHEN Jin; HONG Yi-lin

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Measurement of the line-density of a varied-line-space grating by Moir? fringe

更新时间：2020-08-12

- Measurement of the line-density of a varied-line-space grating by Moir? fringe
- Optics and Precision Engineering Vol. 10, Issue 3, Pages: 285-289(2002)
- 作者机构：
  
  1. 中国科学技术大学, 国家同步辐射实验室,安徽合肥,230029
  2. 安徽师范大学, 物理系,安徽芜湖,241000
  3. 中国科学技术大学, 工程科学学院,安徽合肥,230027
- 作者简介：
- 基金信息：
- DOI：
  CLC： O436.1
- Received：29 October 2001，
  
  Revised：29 March 2002，
  
  Published Online：15 June 2002，
  
  Published：15 June 2002
- 稿件说明：
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朱向冰, 何世平, 付绍军, 徐向东, 陈瑾, 洪义麟. 云纹法检测变线距光栅的线密度[J]. 光学精密工程, 2002,(3): 285-289

ZHU Xiang-bing, HE Shi-ping, FU Shao-jun, XU Xiang-dong, CHEN Jin, HONG Yi-lin. Measurement of the line-density of a varied-line-space grating by Moir? fringe[J]. Editorial Office of Optics and Precision Engineering, 2002,(3): 285-289
朱向冰, 何世平, 付绍军, 徐向东, 陈瑾, 洪义麟. 云纹法检测变线距光栅的线密度[J]. 光学精密工程, 2002,(3): 285-289 DOI：

ZHU Xiang-bing, HE Shi-ping, FU Shao-jun, XU Xiang-dong, CHEN Jin, HONG Yi-lin. Measurement of the line-density of a varied-line-space grating by Moir? fringe[J]. Editorial Office of Optics and Precision Engineering, 2002,(3): 285-289 DOI：

摘要

变线距光栅在同步辐射装置、激光核聚变装置上有着广阔的应用前景

它的制作和检测方法尚未成熟

本文在介绍变线距光栅线密度变化规律的基础上

采用级数形式表达变线距光栅线密度

比较了几种测量方法后

将云纹法引入变线距光栅的检测中

从理论上介绍了几何云纹法和云纹干涉法

几何云纹法适合于线密度很低的光栅

云纹干涉法适合于线密度较高的光栅

云纹的密度反映了光栅的线密度

如果云纹非常密

精确地测量所有云纹的坐标比较难

可以用数云纹数目的方法测出光栅的密度变化

就变线距光栅的检测分别给出了有关理论公式

并给出实际测量中的光路和初步的结果

最后指出这种方法可以用在变线距光栅的加工中.

Abstract

Varied-line-space gratings are very useful in synchrotron radiation devices and laser inertial confinement fusion devices

but there are no good ways to measure and manufacture them.In this paper the line-density of a varied-line-space grating is outlined

which is expressed by power series. In comparison with other methods

the Moir? fringe method is introduced

Moir? and Moir? interferometry discussed. The Moir? is used to check the gratings with very low density; while the Moir? interferometry is used in the gratings with high density. The density of Moir? fringes shows the line density of a grating. If it is very high

the coordinates can not be surveyed exactly

the line-density of a grating can be achieved by counting the number of Moir? fringes. Some formulae are deduced

and the data processing method is given. Finally

the author explains the optical alignment of Moir? interferometry.

关键词

Keywords

references

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时轮,郝德阜. 变栅距衍射光栅的原理及应用[J]. 光学精密工程,2001, 9(3): 284-288.

邢永明. 自动云纹干涉系统及其在复合材料中的应用[J]. 内蒙古工业大学学报, 1994, 13(4): 37-40.

邬柱,戴福隆.云纹干涉法面内位移测量的光栅补偿方法研究[J]. 应用光学,1995,16(2): 53-57.

谢惠民,戴福隆,邹大庆. 高温云纹干涉法的进展[J]. 光学技术,1997, (2): 22-27.

石玲,张云祥,戴福隆. 高灵敏度云纹干涉法[J]. 清华大学学报, 1994, 34(2): 14-17.

卿新林. 云纹干涉法的理论与应用研究评述[J]. 力学与实践, 1997,(6):14-21.

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Explanation of the round interference fringes in the measurement of varied-line-space gratings

Related Author

ZHU Xiang-bing

FU Shao-jun

YE Wei-quan

HE Shi-ping

CHEN Jin

XU Xiang-dong

HONG Yi-lin

Related Institution

NSRL, University of Science and Technology of China

Department of Physics, Anhui Normal University

School of Engineering Science, USTC

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