Research on the flexural hinge-based bender in a synchrotron radiation instrument

QU Yan-feng; LU Li-jun

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Research on the flexural hinge-based bender in a synchrotron radiation instrument

更新时间：2020-08-12

- Research on the flexural hinge-based bender in a synchrotron radiation instrument
- Optics and Precision Engineering Vol. 10, Issue 2, Pages: 220-225(2002)
- 作者机构：
  
  上海大学, 精密机械工程系上海,200072
- 作者简介：
- 基金信息：
- DOI：
  CLC： O432.1
- Received：21 September 2001，
  
  Revised：01 March 2002，
  
  Published Online：15 April 2002，
  
  Published：15 April 2002
- 稿件说明：
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曲艳峰, 吕丽军. 同步辐射仪器中柔性铰链压弯机的研究[J]. 光学精密工程, 2002,(2): 220-225

QU Yan-feng, LU Li-jun. Research on the flexural hinge-based bender in a synchrotron radiation instrument[J]. Editorial Office of Optics and Precision Engineering, 2002,(2): 220-225
曲艳峰, 吕丽军. 同步辐射仪器中柔性铰链压弯机的研究[J]. 光学精密工程, 2002,(2): 220-225 DOI：

QU Yan-feng, LU Li-jun. Research on the flexural hinge-based bender in a synchrotron radiation instrument[J]. Editorial Office of Optics and Precision Engineering, 2002,(2): 220-225 DOI：

摘要

阐述了一种应用柔性铰链产生精密光学反射镜的弹性压弯机构的工作原理.应用经典力学方法对这种压弯机构进行了详细的力学分析

并将这种弹性压弯机构简化成平面钢架结构

用力法正则方程和梁的弯曲方程推导得出镜子的曲率与压弯机构参数及压弯驱动力之间的关系

即压弯机构驱动方程或镜子曲率方程.对影响镜子面形精度的弹性压弯机构参数进行分析

重点讨论了弹性压弯机构转动中心轴和镜子中性面不重合时对镜子面形精度的影响.分析了柔性铰链在这种弹性压弯机构中的作用及其对镜子面形精度的影响.并应用有限元数值计算方法对经典力学分析得出的压弯机构驱动方程进行验证

证实了经典力学分析的正确性.此压弯机构驱动方程可以作为这种弹性压弯机构设计的理论基础.

Abstract

A flexural hinge-based mechanical bender is a very promising dynamical one for synchrotron optics

which is driven by two PZT actuators. It is cheap and energy-tunable

and the precision of the mitrofigure produced by this elastic bender is high. This paper analyses and discusses its working principles classically and systematically

and derives the driving equation

i.e.

the relationship between the mirror shape and driving forces. The finite element method is employed to verify the correctness of the equation based on the classical mechanical analysis. The article focuses on the effect on the mirror curvature radius produced by the derivation between the rotational axes and the neutral plane of the mirror

and the role of the flexure hinge in this elastic bender. It concludes that the bender driving equation can offer academic basis for designing the elastic bender.

关键词

Keywords

references

Ferme J J.New improvements in bendable mirrors[A].SPIE 1997 Proceedings[C].SAN DIEGO-USA,1997.

Sato S, Maezwa H.High heat load vacuum ultraviolet mirror development in Japan[J].Optical Engineering,1995:34(2): 377-387.

Zhang L, Rh T.Design of a flexural hinge-based bender for X-ray optics[A].SPIE‘97,Himeji[C],JAPAN,1997.

Howells M R, Lu D.Design considerations for adjustable-curvature, high-power, X-ray mirrors based on elastic bending[J].Optical Engineering, 1989,32(8):29-32.

Padmore H A,Howells M R.Some new schemes for producing high-accuracy elliptical X-ray morrors by elastic bending[J].SPIE , 1996,2856:145-156.

王复兴,王书贵.材料力学教程[M].中国轻工业出版社, 1995.352-359.

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傅旋.同步辐射光束线中柔性铰链的研究[J].光学精密工程,2001,9(8):67-70.

于靖军.全柔性机构与MEMS[J].光学精密工程,2001,9(8):1-5.

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Related Institution

School of Mechanical Engineering, Shanghai Jiao Tong University

School of Mechanical and Electronic Information Engineering, Shanghai Normal University

University of Chinese Academy of Sciences

Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Chinese Academy of Sciences

Shanghai Advanced Research Institute, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility

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