Design consideration of two-dimensional anti-reflective subwavelength periodic gratings

CAO Zhao-liang; LU Zhen-wu; LI Feng-you; ZHANG Hui-juan; SUN Qiang

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Design consideration of two-dimensional anti-reflective subwavelength periodic gratings

更新时间：2020-08-12

- Design consideration of two-dimensional anti-reflective subwavelength periodic gratings
- Optics and Precision Engineering Vol. 10, Issue 6, Pages: 537-541(2002)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所, 应用光学国家重点实验室,吉林长春,中国,130033
  2. 南开大学, 现代光学研究所, 光电信息技术科学教育部重点实验室天津,300071
- 作者简介：
- 基金信息：
- DOI：
  CLC： O436.1
- Received：23 April 2002，
  
  Revised：22 October 2002，
  
  Published Online：15 December 2002，
  
  Published：15 December 2002
- 稿件说明：
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曹召良, 卢振武, 李凤友, 张慧娟, 孙强. 二维抗反射亚波长周期结构光栅的设计分析[J]. 光学精密工程, 2002,(6): 537-541

CAO Zhao-liang, LU Zhen-wu, LI Feng-you, ZHANG Hui-juan, SUN Qiang. Design consideration of two-dimensional anti-reflective subwavelength periodic gratings[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 537-541
曹召良, 卢振武, 李凤友, 张慧娟, 孙强. 二维抗反射亚波长周期结构光栅的设计分析[J]. 光学精密工程, 2002,(6): 537-541 DOI：

CAO Zhao-liang, LU Zhen-wu, LI Feng-you, ZHANG Hui-juan, SUN Qiang. Design consideration of two-dimensional anti-reflective subwavelength periodic gratings[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 537-541 DOI：

摘要

利用严格耦合波理论(RCWA)和等效介质理论(EMT)研究了二维抗反射亚波长周期结构光栅的设计问题.以立方体和柱状单台阶网格光栅和金字塔形及圆锥形多台阶光栅为例

主要研究了占空比和表面面形对反射率的影响.通过计算发现

当光栅周期足够小的时候

光栅面形对反射率没有影响

同时占空比严重影响着光栅的特性

这对设计制造抗反射光栅非常有用.同时也研究了等效介质理论的适用性.

Abstract

This paper investigates the design of a two-dimensional anti-reflective subwavelength grating

by means of RCWA and EMT

take for example

the square-pillar and columned binary gratings

and pyramidal and coned multi-level gratings

the impact of filling factor and surface profile on the reflectance of a grating are mainly considered. It is shown that surface profile has no effect on the reflectivity when the period is sufficiently small

but the wavelength and the filling factor have an important impact on the diffraction characteristics of the grating. So it is very important to design an anti-reflective grating. The validity of EMT is also investigated in the paper.

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Keywords

references

樊叔维.任意槽形光栅衍射特性的矢量理论分析与计算[J]. 光学精密工程,2000,8(1):5-10.

Motamedi M E, Southwell W H,Gunning W L. Antireflection surfaces in silicon using binary optics technology[J]. Appl. Opt,1992,31(22):4371-4376.

Grann E B, Moharam M G,Pommet D A. Optimal design for antireflective tapered two-dimensional subwavelength grating structures[J].J. Opt. Soc. Am.A, 1995,12(2):333-339.

Bruer R,Bryngdahl O.Design of antireflection gratings with approximate and rigorous methods[J]. Appl. Opt,1994,33(34):7875-7882.

Lalanne P, Astilean S, Chavel P. Blazed binary subwavelength gratings with efficiencies larger than those of conventional echelette gratings[J]. Opt. Lett, 1998,23(14):1081-1083.

鱼卫星,卢振武,王鹏,等.亚波长周期结构与多层增透膜反射特性的比较[J].光学精密工程,2001,9(1):10-14.

Turunen I,Wyrowski F. Diffractive Optics for Industrial and Commercial Applications[M], AkademieVerlag GmbH, Berlin, 1997, Chap.1997,11:305-307.

Raguin D H,Mchael M G.Antireflection structured surfaces for the infrared spectral region[J]. Appl. Opt,1993,32(7):1154-1167.

Zhang D W, Lu Z W, Yu W X, et al. Electromagnetic diffraction analysis of columned grid gratings[J]. J. Opt. A: Pure Appl. Opt,2002,4: 180-186.

Zhang D W, Lu Z W, Yu W X, et al. Electromagnetic diffraction analysis of 2-D antireflective subwavelength grating with coned profile[J]. Chinese Journal of laser B, 2002,11(4):273-280.

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