Research on the structure design of a precision stage based on magnetic levitation technology and used in micro-electron manufacturing field

SONG Wen-rong; YU Guo-fei; SUN Bao-yu; WANG Yan-feng; HE Hui-yang

doi:null

您当前的位置：

首页 >

文章列表页 >

Research on the structure design of a precision stage based on magnetic levitation technology and used in micro-electron manufacturing field

更新时间：2020-08-12

- Research on the structure design of a precision stage based on magnetic levitation technology and used in micro-electron manufacturing field
- Optics and Precision Engineering Vol. 10, Issue 3, Pages: 271-275(2002)
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
  2. 吉林大学, 机械科学与工程学院,吉林长春,130025
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN403
- Received：08 January 2002，
  
  Revised：20 April 2002，
  
  Published Online：15 June 2002，
  
  Published：15 June 2002
- 稿件说明：
移动端阅览
宋文荣, 于国飞, 孙宝玉, 王延风, 何惠阳. 微电子制造领域的磁悬浮精密定位平台的结构设计研究[J]. 光学精密工程, 2002,(3): 271-275

SONG Wen-rong, YU Guo-fei, SUN Bao-yu, WANG Yan-feng, HE Hui-yang. Research on the structure design of a precision stage based on magnetic levitation technology and used in micro-electron manufacturing field[J]. Editorial Office of Optics and Precision Engineering, 2002,(3): 271-275
宋文荣, 于国飞, 孙宝玉, 王延风, 何惠阳. 微电子制造领域的磁悬浮精密定位平台的结构设计研究[J]. 光学精密工程, 2002,(3): 271-275 DOI：

SONG Wen-rong, YU Guo-fei, SUN Bao-yu, WANG Yan-feng, HE Hui-yang. Research on the structure design of a precision stage based on magnetic levitation technology and used in micro-electron manufacturing field[J]. Editorial Office of Optics and Precision Engineering, 2002,(3): 271-275 DOI：

摘要

利用磁悬浮技术将铁磁性平台悬浮在磁场中

通过线性电机无接触驱动

结合控制技术实现平台的快速精密定位.合理的设计将悬浮力和导向力两个磁悬浮系统合二为一

即结构简单

控制容易又能获得精确的导向精度.选用线性同步电机

避免了感应电机磁场感应所产生的法向力对平台的振动作用

有利于悬浮系统的控制.悬浮系统无接触

无摩擦

克服了磨损、金属粉尘及油脂污染等问题;无接触线性驱动减少了机械联结件

消除了联结间隙

减轻了重量

能有效提高动态响应频率和定位精度;这些使定位平台能够满足现代信息产业对超洁净制作环境和高精度、高效率的要求.

Abstract

A new kind of stage which can be positioned accurately and quickly is presented in this paper. Magnetic levitation (maglev.)

linear drive and control technologies are applied in the stage. With a maglev system providing normal lift force and plane guiding force

the structure of the stage is simple and it can be controlled easily. By using linear synchronous motor

vibration caused by linear induction motor disappears

which benefits the maglev controlling system. Because of levitation and non-contact driving

there are no friction

wearing

metal particle

grease pollution and linking gap

and the total weight of the stage is lighter. All above improve its dynamic response frequency and the positioning accuracy. This stage meets the requirements of modern information industry to super-clean condition

high accuracy and high efficiency in micro-electron manufacturing field.

关键词

Keywords

references

Schweitzer G, Traxler A,et al.主动磁轴承--基础、性能及应用[M].北京:新时代出版社,1997.

纳斯尔 S A, 波尔达 I.直线电机[M].北京:科学出版社,1982,102-107.

连级三.磁浮列车原理及技术特征[J].电力机车技术,2001,24(3):23-26.

江浩,连级三.单磁铁悬浮系统的动态模型与控制[J].西南交通大学学报,1992,83(1):60-67.

李云钢,常文森,龙志强.EMS磁浮列车的轨道共振和悬浮控制系统设计[J].国防科技大学学报,1999,21(2):93-96.

王洪礼,吴志强.磁力轴承转子系统的Hopf分岔[J].天津大学学报,1994,27(6):752-757.

姚宏,徐建学.一类非线性磁浮控制系统局部分岔特性研究[J].西安交通大学学报,1999,33(4):61-64.

宋洪涛,宾鸿赞.把神经网络应用于丝杠磨削过程的建模与控制[J].光学精密工程,2001,9(4):364-367.

陶永华,尹怡欣,葛芦生.新型PID控制及其应用[M].北京:机械工业出版社,1998.

Views

778

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

No data

Related Author

No data

Related Institution

No data

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰