Research on the mechanism of a series bending arms piezoelectric micromotor

TONG Jian-hua; SHAO Pei-ge; WANG Li-ding

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Research on the mechanism of a series bending arms piezoelectric micromotor

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- Research on the mechanism of a series bending arms piezoelectric micromotor
- Optics and Precision Engineering Vol. 10, Issue 5, Pages: 471-475(2002)
- 作者机构：
  
  大连理工大学, 微机电系统研究中心, 辽宁, 大连, 116024
- 作者简介：
- 基金信息：
- DOI：
  CLC： TM301
- Received：12 February 2002，
  
  Revised：08 July 2002，
  
  Published Online：15 October 2002，
  
  Published：15 October 2002
- 稿件说明：
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佟建华, 邵培革, 王立鼎. 串联弯曲臂压电微电机机理初步研究[J]. 光学精密工程, 2002,(5): 471-475

TONG Jian-hua, SHAO Pei-ge, WANG Li-ding. Research on the mechanism of a series bending arms piezoelectric micromotor[J]. Editorial Office of Optics and Precision Engineering, 2002,(5): 471-475
佟建华, 邵培革, 王立鼎. 串联弯曲臂压电微电机机理初步研究[J]. 光学精密工程, 2002,(5): 471-475 DOI：

TONG Jian-hua, SHAO Pei-ge, WANG Li-ding. Research on the mechanism of a series bending arms piezoelectric micromotor[J]. Editorial Office of Optics and Precision Engineering, 2002,(5): 471-475 DOI：

摘要

把两片压电双晶片(PZT Bimorph)串联在一起

构成串联弯曲臂.一端固定

另一端自由时

在相位差为π/2的一定频率的方波信号驱动下

弯曲臂的自由端将形成类似椭圆的运动轨迹.以串联弯曲臂为驱动元件

可用来驱动与其端面相接触的转子转动

构成串联弯曲臂式压电微电机.本文将对串联弯曲臂的驱动机理进行分析

在新的微小尺寸驱动机理研究的椭圆运动的基础上

研制了串联弯曲臂压电微电机的样机

并且对样机的性能参数进行测试

转速可以达到110rpm

输出转矩可以达到22.5μNm.

Abstract

Series bending arms are composed of two piezoelectric bimorphs

one end of which is fixed and the other end is free. Driven by two signals of the biased bar with phase difference of π/2

the free end of a cantilever arm will move along an elliptic orbit . When the cantilever is used to drive a cylinder rotator

the end of the surface contacts the free end of the cantilever

the rotator will rotate .This paper analyzes the drive mechanism and puts forward a new drive theory.A new micormotor model was designed

and its movement parameters were tested

the rotational speed being up to 110rpm

and the torque reaching about 22.5 μNm.

关键词

Keywords

references

上羽贞行,富川义郎.超声波马达理论与应用[M] .上海:上海科学技术出版社,1998.

邵培革,曲炳郡,王立鼎.串联臂驱动压电微电机研究[J] .仪器仪表学报,1999,20(4):170-171.

史小军,堵国梁,朱为.超声波电机及其应用[J] .电子器件,1997,20(4):37-45.

梁克平.串联臂压电微电机及其驱动系统的研究[D] .大连:大连理工大学,2001.

邵培革.微小压电电机研究[R] .大连:大连理工大学,2000.

梁克平,邵培革,杨敬涵,等.串联臂压电微电机及其驱动电源的研究[J] .仪器仪表学报,2001,22(5):91-93.

Suzuki Y, Tani K, Sakuhara T.Development of a new type piezoelectric micromotor[J] . Sensors and Actuators,2000,83:244-248.

杨宜民.新型驱动器及其应用[M] .北京:机械工业出版社,1997.

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College of Electronic Science， National University of Defense Technology

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