Explanation of the round interference fringes in the measurement of varied-line-space gratings

ZHU Xiang-bing; FU Shao-jun; YE Wei-quan; HE Shi-ping; CHEN Jin; XU Xiang-dong; HONG Yi-lin

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Explanation of the round interference fringes in the measurement of varied-line-space gratings

更新时间：2020-08-12

- Explanation of the round interference fringes in the measurement of varied-line-space gratings
- Optics and Precision Engineering Vol. 10, Issue 6, Pages: 634-638(2002)
- 作者机构：
  
  1. 中国科学技术大学, 国家同步辐射实验室,安徽合肥,230029
  2. 安徽师范大学, 物理系,安徽芜湖,241000
  3. 中国科学技术大学, 工程科学学院,安徽合肥,230027
- 作者简介：
- 基金信息：
- DOI：
  CLC： O436.1
- Received：21 April 2002，
  
  Revised：12 September 2002，
  
  Published Online：15 December 2002，
  
  Published：15 December 2002
- 稿件说明：
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朱向冰, 付绍军, 叶为全, 何世平, 陈瑾, 徐向东, 洪义麟. 对变线距光栅干涉测量中的环形条纹的分析[J]. 光学精密工程, 2002,(6): 634-638

ZHU Xiang-bing, FU Shao-jun, YE Wei-quan, HE Shi-ping, CHEN Jin, XU Xiang-dong, HONG Yi-lin. Explanation of the round interference fringes in the measurement of varied-line-space gratings[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 634-638
朱向冰, 付绍军, 叶为全, 何世平, 陈瑾, 徐向东, 洪义麟. 对变线距光栅干涉测量中的环形条纹的分析[J]. 光学精密工程, 2002,(6): 634-638 DOI：

ZHU Xiang-bing, FU Shao-jun, YE Wei-quan, HE Shi-ping, CHEN Jin, XU Xiang-dong, HONG Yi-lin. Explanation of the round interference fringes in the measurement of varied-line-space gratings[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 634-638 DOI：

摘要

变线距光栅能够自动聚焦和消像差

在同步辐射装置、激光核聚变装置上有着广阔的应用前景

本文用干涉法测量变线距光栅的密度

设计并给出了实验中的光路

发现了环形的干涉条纹和变化规律

分析了这些现象产生的原因

产生明显的环形条纹的必要条件首先是变线距光栅的线密度单调变化的

连续增加或连续减小

其次要光栅的刻线是弯的

第三虚栅的密度接近待测光栅的整数倍

由于元件位置偏差

检测用的平面波会变成球面波

也会产生环形的干涉条纹

但是这种效应可以忽略.预言了类似双曲线的干涉条纹.通过对条纹运动规律的分析

可以在初步测量中定性分析光栅密度的变化趋势

从而为进一步测量做准备.

Abstract

Varied-line-space gratings can correct aberrations

and they are useful in synchrotron radiation devices and laser inertial confinement fusion devices. In this paper

the line-density of varied-line-space gratings is measured with interferometry. The design of optical alignment is given

and the round interference fringes and their changes are observed in experiments. The prerequisite of round interference fringes is that the density of gratings is monotone

and the density of virtual grating divided by a integer is close to it

but the grooves are curved. The fringes that hyperbolas are predicted.

关键词

Keywords

references

Namioka T, Koike M. Aspheric wave-front recording optics for holographic gratings[J]. Appl. Opt, 1995, 34:2180-2186.

王炜,杨厚民. 平面变栅距光栅的原理及设计[J]. 光学学报,1999,19(9):1158-1162.

Hettrick M C, Bowyer S. Varied line-space gratings: new designs for use in grazing incidence spectrometers [J]. Appl. Opt. 1983, 22:3921-3924.

时轮,郝德阜. 变栅距衍射光栅的原理及应用[J]. 光学精密工程,2001, 9(3): 284-288.

Cocco D, Sergo R, Sostero G, et al. High precision measurements of the groove density of diffraction gratings[A]. San Diego: Conference on Soft X-Ray and EUV Imaging Systems[C]. 2000.

Chen S J, Chen C T, Perng S Y, et al. Design and fabrication of an active polynomial grating for soft-X-ray monochromators and spectrometers[A]. Berlin 7th International Conference on Synchrotron Radiation Instrumentation[C]. 2000.

朱向冰,何世平,付绍军,等. 云纹法检测变线距光栅的线密度[J]. 光学精密工程,2002, 10(3):285-289.

Deville B, Bonnemason F. Holographically recorded, ion etched variable line space gratings[J]. SPIE, 1998. 3450:24-35.

Palmer C. Theory of second-generation holographic diffraction gratings[J]. J.Opt.Soc.Am.A, 1989,6(8):1175-1188.

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Related Author

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CHEN Jin

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FU Shao-jun

HE Shi-ping

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Related Institution

School of Engineering Science, USTC

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School of Mechanical and Electrical Engineering， Xi'an Polytechnic University

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