Study of the technology of modeling and simulation of MEMS

JI Guo-shun; ZHANG Yong-kang

doi:null

您当前的位置：

首页 >

文章列表页 >

Study of the technology of modeling and simulation of MEMS

更新时间：2020-08-12

- Study of the technology of modeling and simulation of MEMS
- Optics and Precision Engineering Vol. 10, Issue 6, Pages: 626-631(2002)
- 作者机构：
  
  江苏大学, 机械工程学院,江苏镇江,212013
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH128
- Received：17 August 2002，
  
  Revised：17 October 2002，
  
  Published Online：15 December 2002，
  
  Published：15 December 2002
- 稿件说明：
移动端阅览
季国顺, 张永康. 微机械系统建模与仿真技术研究[J]. 光学精密工程, 2002,(6): 626-631

JI Guo-shun, ZHANG Yong-kang. Study of the technology of modeling and simulation of MEMS[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 626-631
季国顺, 张永康. 微机械系统建模与仿真技术研究[J]. 光学精密工程, 2002,(6): 626-631 DOI：

JI Guo-shun, ZHANG Yong-kang. Study of the technology of modeling and simulation of MEMS[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 626-631 DOI：

摘要

简要分析了微电子机械系统建模仿真的原因

指出了微电子机械建模仿真需要克服的四个方面技术难题

即尺度效应、开发快速的表面力计算方法、多物理场耦合分析、宏模型的建立

为微电子机械系统的建模仿真指明了研究方向.详细分析了微电子机械系统建模仿真的技术关键

多物理场耦合计算的理论方法和器件及系统宏观模型的建立

介绍了用于MEMS系统级模拟仿真的宏模型建立的几种方法

最后结合硬件描述语言VHDL-AMS提出了建立微电子机械系统模型实现系统级模拟的方法.

Abstract

This paper analyzes the reason for modeling and simulation of MEMS briefly.There are four difficulties i.e.

microscale effect

fast algorithms of surface force

multiple physics fields coupling algorithms

and development of macromodel of MEMS or microdevice in modeling and simulation of MEMS.Their key technologies are analyzed in detail.Several current methodologies of system-level modeling and simulation of MEMS are introduced. The method of modeling MEMS with the aid of VHDL-AMS is finally proposed.

关键词

Keywords

references

李路明,王立鼎.MEMS的研究的新进展--微型系统及其发展应用的研究[J].光学精密工程,1997,5(1):67-73.

陈愚,钟先信,黎凯.微系统CAD的研究现状及展望[J].光学精密工程,1999,7(6):1-5.

Andrzej P. Integrated multidisciplinary CAD/CAE environment for micro-electro-mechanical systems (MEMS)[J]. SPIE,1999,3680(I):432-439.

李炳乾.MEMS谐振器件及其相关理论研究[D].西安交通大学,2001.

Cai X,Yie H,Osterberg P, et al.Relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D micromechanical structures[A]. Proceedings of the 1993 IEEE/ACM International Conference on Computer-Aided Design[C],1993,283-286.

Aluru N R ,White J.Efficient numerical technique for electromechanical simulation of complicated microelectromechanical structures[J].Sensors and Actuators A:Physical,1997,58(1):1-11.

Aluru N R,White J.Multi-level Newton method for static and fundamentak frequency analysis of electromechanical systems[A]. International Conference on Simulation of Semiconductor Processes and Devices, SISPAD[C]. 1997,125-128.

Aluru N R,White J.Coupled numerical technique for self-consistent of micro-electro-mechanical-systems[A]. American Society of Mechanical Engineers[C], Dynamic Systems and Control Division,1996,59:275-280.

高行山,林胜勇.加速松弛法及其在静电-力耦合问题仿真分析中的应用[J].机械强度,2001,23(4):500-502.

Urahama K.Convergence properties of waveform relaxation-newton method[J]. Fundamental Electronic Science,1989,72(8):108-115.

Senturia S D,Aluru N,White J.Simulating the behavior of MEMS device:Computational method and needs[J].IEEE Computational Science and Engineering ,1997,4(1):30-43.

Pan J Y ,Lin P,Maseeh F,et al. Verification of FEM analysis of load-defection method for measuring mechanical properties of thin films[J]. IEEE Solid-State Sensor and Actuator Workshop,1990,70-74.

Osterberg P M,Senturia S D.M-TEST:a test chip for MEMS Material property measurement using electrostaticly actuated test structures[J].Joural of a Microelectromechanical systems,1997,6(2):107-118.

Xu L,Darling R B, Lauritzen P O. Compact modeling of bistable electrostatic actuators[A]. 1999 International Conference on Modeling and Simulation of Microsystems[C]. 1999,289-292.

Swart N R,Bart S F,Zaman M H,et al. AutoMM: Automatic generation of dynamic macromodels for MEMS devices[A]. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)[C]. 1998, 178-183.

Wang F,White J.Automatic model order reduction of a microdevice using the Arnoldi approach[J].American Society of Mechanical Engineer,Dynamic Systems and Control Division,1998,66:527-530.

Chen J H, Kang S M. Algorithm for automatic model-order reduction of nonlinear MEMS devices[A]. Proceedings IEEE International Symposium on Circuits and Systems[C], 2000,II-445-II-448.

Chen J H, Kang S M. Model-order reduction of nonlinear MEMS devices through arclength-based Karhunen-Loeve decomposition[J]. IEEE International Symposium on Circuits and Systems,2001,3:457-460.

Chen J H, Kang S M. Dynamic macromodeling of MEMS mirror devices[A]. Technical Digest - International Electron Devices Meeting[C],2001,925-928.

Liang Y C,Lin W Z ,Lee H P,et al.A neural-network-based method of model reduction for the dynamic simulation of MEMS[J]. Journal of Micromechanics and Microengineering,2001,11(3):226-233.

Gabbay L D.Computer aided Macromodeling for MEMS[M]. USA:MIT,PhD Thesis,1998.

孟为民,李伟化,黄庆安.MEMS的设计方法与系统模拟[J].传感器技术,2001,20(10):57-60.

孙道恒,黄元庆,郑炜,等.MEMS系统级仿真建模理论与方法的研究[J].厦门大学学报.40(2):297-302.

VHDL1076-1k1.htm/#intro[EB/OL].http://www.vhdl-ams.com/microcosm/.

Views

634

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Design and Fabrication of a DC to 30 GHz DC-Contact Shunt RF MEMS Switch

Modeling and Simulation of Electromechanical System with Cam Mechanism

Application or Micro Electro Mechanical System on Medicine and Biology

Related Author

侯智昊

刘泽文

李志坚

LI Xing-Hua

ZHAI Lin-Pei

Ma Jianxu

Wang Liding

Wu Yihui

Related Institution

清华大学2. 清华大学微电子所

Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Changchun 130022

Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰