

浏览全部资源
扫码关注微信
New Industry Creation Hatchery Center (NICHe), Tohoku University+ Graduate School of Engineering, Tohoku University Sendai,980-8579
Received:17 October 2002,
Revised:16 November 2002,
Published Online:15 December 2002,
Published:15 December 2002
移动端阅览
Masayoshi Esashi, Takahito Ono+. Micro-nano electromechanical system by bulk silicon micromachining[J]. 光学精密工程, 2002,(6): 608-613
Masayoshi Esashi, Takahito Ono+. Micro-nano electromechanical system by bulk silicon micromachining[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 608-613
Masayoshi Esashi, Takahito Ono+. Micro-nano electromechanical system by bulk silicon micromachining[J]. 光学精密工程, 2002,(6): 608-613 DOI:
Masayoshi Esashi, Takahito Ono+. Micro-nano electromechanical system by bulk silicon micromachining[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 608-613 DOI:
MEMS(Micro ElectroMechanical System)based on semiconductor microfabrication plays im-portant roles for example in the periphery of IT systems.N EMS(Nano Elect roMechanical Sys-tem)contains nano-scale structures.Sop histicated and high performance systems based on the MEMS and the NEMS have been developed.Packaging and elect rical interconnection play an important role in realizing practically applicable systems.
MEMS(Micro ElectroMechanical System)based on semiconductor microfabrication plays im-portant roles for example in the periphery of IT systems.N EMS(Nano Elect roMechanical Sys-tem)contains nano-scale structures.Sop histicated and high performance systems based on the MEMS and the NEMS have been developed.Packaging and elect rical interconnection play an important role in realizing practically applicable systems.
Esashi M.Encapsulated Micro Mechanical Sensors[J].M icrosystem Technologies,1994,(1):2.
Fukatsu K,Murakoshi T,Esashi M.Evaluation Experiment of Electrostatically Levitating Inertia Measurement System[A].Technical Digest of the 18 th Sensor S ym posium[C],Kawasaki,2001.
Jono K,Hashimoto M,Esashi M.Electrostatic Servo System for Multi-axis Accelerometers[A].M EM S’94,Oiso[C]. 1994.
Toda R,Takeda N,Murakoshi T,et al.Electrostatically Levitated Spherical 3-axis Accelerometer[A].Technical Digest of M EM S’2002[C].Las Vegas,2002.
Fukatsu K,Murakoshi T,Nakamura S,et al.Electrostatically Levitated Rotational Ring-Shaped Gyro/Accelerometer for Inertia Measurement Systems[A].S ym posium Gyro Technology[C].Stuttgart 2002.
Lee D W,Ono T,Esashi M.Fabrication of Microprobe Array wit h Sub-100nm Nano-Heater for Nanometric Thermal Imaging and Data Storage[A].Technical Digest of M EM S’2001[C].Interlaken,2001:20.
Li X,Abe T,Esashi M.High Density Electrical Feedt hrough Fabricated by Deep Reactive Ion Etching of Pyrex Glass[A].Technical Digest of M EM S’2001[C].2001.
Takimura N,Lee D W,Phan M N,et al.Heater Integarated Micro Probe for High-Density Data Storage[A]. Technical Digest of t he 17 t h Sensor S y m posi u m[C].2000.
Lee D W,Ono T,Esashi M.Recording on PZT and AgInSb Te t hin films for probe-based data storage[A].Technical Digest M EM S’2002[C],Las Vegas,2002.
Bae J H,Ono T,Kamiya S,et al.Scanning Diamond Probe for Nano-processing[A].Proceedi ngs of the 19 th Sensor S y m posi u m[C].2002.
Suzuki G,Esashi M.Planer Fabrication of Multilayer Piezoelectric Actuator by Groove Cutting and Electroplating[A]. Proc.of t he M icro Elect ro Mechanical S ystems’2000[C].2000.
Zhang D Y,Chang C,Ono T,et al.A Piezodriven XY-Microstage for Multiprobe Nano-recording[A].Pacif ic Ri m W orkshop on T ransducers and M icro/N ano Technologies[C].2002.
Minh P N,et.al.Fabrication and Characterization of Carbon Nanotube on a Si Tip for Electron Field Emitter[A]. 15 t h Intern.V acuum M icroelect ronics Conf.and 48 th Intern[C].Field Emission Symposium,Lyon PT.49 2002.
Ono T,Miyashita H,Esashi M.Electric-field-enhanced Growt h of Carbon Nanotubes for Scanning Probe Microscopy[J].N anotechnology,2002,13:62.
Minh P N,et.al.Microfabrication and Characterization of Field Emission Device wit h Integrated Electrostatic Lens Ar2 ray[A],Pacif ic Ri m M EM S W orkshop[C].2002.
Yang J,Ono T,Esashi M.Surface Effects and High Quality Factors in Ultrat hin Single-crystal Silicon Cantilevers[J]. A pplied Physics L etters,2000,77:386.
Ono T,Li X,Lee D W,et al.Nanometric Sensing and Processing wit h Micromachined Functional Probe[A]. Technical Digest of t he T ransducers’01[C].Mueunchen 2001."
0
Views
265
下载量
0
CSCD
Publicity Resources
Related Articles
Related Author
Related Institution
京公网安备11010802024621