Grazing exit X-ray fluorescence spectrometer

GONG Yan; CHEN Bo; NI Qi-liang; CAO Jian-lin

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Grazing exit X-ray fluorescence spectrometer

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- Grazing exit X-ray fluorescence spectrometer
- Optics and Precision Engineering Vol. 10, Issue 6, Pages: 597-601(2002)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所, 应用光学国家重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： O431.1
- Received：10 June 2002，
  
  Revised：17 October 2002，
  
  Published Online：15 December 2002，
  
  Published：15 December 2002
- 稿件说明：
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巩岩, 尼启良, 陈波, 曹健林. 掠出射X射线荧光光谱仪研制[J]. 光学精密工程, 2002,(6): 597-601

GONG Yan, CHEN Bo, NI Qi-liang, CAO Jian-lin. Grazing exit X-ray fluorescence spectrometer[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 597-601
巩岩, 尼启良, 陈波, 曹健林. 掠出射X射线荧光光谱仪研制[J]. 光学精密工程, 2002,(6): 597-601 DOI：

GONG Yan, CHEN Bo, NI Qi-liang, CAO Jian-lin. Grazing exit X-ray fluorescence spectrometer[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 597-601 DOI：

摘要

掠出射X射线荧光分析技术是分析薄膜特性和介质表面的一种重要工具.文中简述了利用掠出射X射线荧光技术分析薄膜厚度的原理和方法

介绍了一种在实验室里由激发光源、样品承载系统、色散系统、探测系统和数据收集及处理系统构成的掠出射X射线荧光光谱仪系统

并给出了利用

Fe放射性同位素标定该光谱仪系统的试验结果.

Abstract

The technology of grazing exit X-ray fluorescence is an important tool for the analysis of thin layer characteristics and media surfaces. The principle of analysis of thin layer thickness by this method is described in this paper. A grazing exit X-ray fluorescent spectrometer has been constructed in our lab

which is composed of an exciting source

a sample stage

a monochromator

and a detecting system

collecting data and compressing units. Meanwhile

the result of calibrating this spectrometer by.

Fe is presented.

关键词

Keywords

references

巩岩,陈波,尼启良,等.掠出射X射线荧光分析[J].物理,2002,31(3):167-170.

Spiller E. Experience with the in situ monitor system for fabrication of X-ray mirrors[J]. SPIE, 1985,563: 367-375.

Per S, Galnnder B,Nyberg T, et al. Probe depth variation in grazing exit soft-X-ray emission spectroscopy[J]. Nucl. Instr. and Meth. in Phys. Res. 1997,A384:558-562.

Pérez R D, Sánchez H J. New spectrometer for grazing exits X-ray fluorescence[J]. Rev.Sci.Instrum., 1997,68(7): 2681-2684.

Terada S, Murakami H, Nishihagi K.Thickness and composition measurement for thin film with combined X-ray technique[A].1999 IEEE/SEMI Advanced Semiconductor Manufacturing Conference[C]. 1999,414-419.

刘亚雯,肖辉.掠射技术与X射线荧光分析[J].光谱学与光谱分析,1998,18(5): 609-613.

卢启鹏.高分辨掠入射软X射线-真空紫外单色仪[J].光学精密工程,1998,6(5):91-95.

Claes M,Grieken R V.Comparision of grazing emission XRF with total reflection XRF and other X-ray emission techniques[J].X-ray Spectrom 1997,26:153-158.

北京大学,复旦大学.核物理实验[M].北京:原子能出版社,1984.

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