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Measurement and machining in microfabrication based on radiation pressure control
- Optics and Precision Engineering Vol. 11, Issue 1, Pages: 22-29(2003)
- 作者机构：
Osaka University, 2-1 Yamadaoka, Suita Osaka,JAPAN,565-0871
- 作者简介：
- 基金信息：
DOI：
CLC： TH161Received：17 January 2002，
Revised：09 December 2002，
Published Online：15 February 2003，
Published：15 February 2003
- 稿件说明：
移动端阅览
Yasuhiro TAKAYA, Satoru TAKAHASHI, Takashi MIYOSHI. Measurement and machining in microfabrication based on radiation pressure control[J]. 光学精密工程, 2003,(1): 22-29
Yasuhiro TAKAYA, Satoru TAKAHASHI, Takashi MIYOSHI. Measurement and machining in microfabrication based on radiation pressure control[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 22-29
Yasuhiro TAKAYA, Satoru TAKAHASHI, Takashi MIYOSHI. Measurement and machining in microfabrication based on radiation pressure control[J]. 光学精密工程, 2003,(1): 22-29 DOI：
Yasuhiro TAKAYA, Satoru TAKAHASHI, Takashi MIYOSHI. Measurement and machining in microfabrication based on radiation pressure control[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 22-29 DOI：
摘要
We have been developing new fabrication tools based on optical radiation pressur e and related phenomena to develop aflexible and accurate microfabrication tec hnology. In this paper
the laser trapping probe for the nano-CMM for assessment
in addition to micromachining technique using a small particle controlled by optical radiation pressure and laser aggregation technique are discussed. As the positional detection probe for the nano-CMM
an optically trapped silica particle with 8 mm diameter in forced oscillation state is used. A probe sphere retains a stable position when applied with trapping force by Nd:YAG laser light formed an nu lar and is forced to oscillate by the driving force changed by modulating the in tensity of LD emission. Experintal results show that this vibrational microprobe h as the possibility to achieve positional sensing accuracy of less than 25 nm. As a new micromachining technique
nano-removal process using an optically trapped micro-grain is proposed. The laser trapping force enables not only to stably trap the diamond grain with asymmetrical shape but also to freely control the positi on with spinning. Using this micro machining tool
the machining experiments of h ydrocarbon film are performed. AFM observation confirmed that the fine groove wi th depths of about 3～4 nm can be fabricated. As an additive process based on ra diation pressure
a laser microstructure fabrication using laser agglomeration p h enomena of colloidal particles aided by radiation pressure is investigated. By c ontrolling laser beam scanning in slurry containing KOH solution and SiO
2
par ticles with a diameter of 140 nm
colloidal particles are aggregated and adhered firmly to a silicon wafer substrate. Using this laser agglomerating process
two-dimensional grid microstructures at the pitch of 5 mm can be fabricated.
Abstract
We have been developing new fabrication tools based on optical radiation pressur e and related phenomena to develop aflexible and accurate microfabrication tec hnology. In this paper
the laser trapping probe for the nano-CMM for assessment
in addition to micromachining technique using a small particle controlled by optical radiation pressure and laser aggregation technique are discussed. As the positional detection probe for the nano-CMM
an optically trapped silica particle with 8 mm diameter in forced oscillation state is used. A probe sphere retains a stable position when applied with trapping force by Nd:YAG laser light formed an nu lar and is forced to oscillate by the driving force changed by modulating the in tensity of LD emission. Experintal results show that this vibrational microprobe h as the possibility to achieve positional sensing accuracy of less than 25 nm. As a new micromachining technique
nano-removal process using an optically trapped micro-grain is proposed. The laser trapping force enables not only to stably trap the diamond grain with asymmetrical shape but also to freely control the positi on with spinning. Using this micro machining tool
the machining experiments of h ydrocarbon film are performed. AFM observation confirmed that the fine groove wi th depths of about 3～4 nm can be fabricated. As an additive process based on ra diation pressure
a laser microstructure fabrication using laser agglomeration p h enomena of colloidal particles aided by radiation pressure is investigated. By c ontrolling laser beam scanning in slurry containing KOH solution and SiO
2
par ticles with a diameter of 140 nm
colloidal particles are aggregated and adhered firmly to a silicon wafer substrate. Using this laser agglomerating process
two-dimensional grid microstructures at the pitch of 5 mm can be fabricated.
关键词
Keywords
references
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NISHIKAWA M, TAKAYA Y, TAKAHASHI S,et al. Probing technique for microparts using optically trapped particle by annular beam[A]. Proc of International Symposiun on Photonics in Measurement[C].2002.103.
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