Fabrication process analysis for electrostatically actuated microgripper based on silicon bulk micromachining

LI Yong; LI Yu-he; LI Qing-xiang; ZI Yan-yang

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Fabrication process analysis for electrostatically actuated microgripper based on silicon bulk micromachining

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- Fabrication process analysis for electrostatically actuated microgripper based on silicon bulk micromachining
- Optics and Precision Engineering Vol. 11, Issue 2, Pages: 109-113(2003)
- 作者机构：
  
  清华大学, 精密仪器与机械学系北京,100084
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP241;TN305.2
- Received：12 November 2002，
  
  Revised：15 January 2003，
  
  Published Online：15 April 2003，
  
  Published：15 April 2003
- 稿件说明：
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李勇, 李玉和, 李庆祥, 訾艳阳. 基于体硅工艺的静电致动微夹持器制作工艺分析[J]. 光学精密工程, 2003,(2): 109-113

LI Yong, LI Yu-he, LI Qing-xiang, ZI Yan-yang. Fabrication process analysis for electrostatically actuated microgripper based on silicon bulk micromachining[J]. Editorial Office of Optics and Precision Engineering, 2003,(2): 109-113
李勇, 李玉和, 李庆祥, 訾艳阳. 基于体硅工艺的静电致动微夹持器制作工艺分析[J]. 光学精密工程, 2003,(2): 109-113 DOI：

LI Yong, LI Yu-he, LI Qing-xiang, ZI Yan-yang. Fabrication process analysis for electrostatically actuated microgripper based on silicon bulk micromachining[J]. Editorial Office of Optics and Precision Engineering, 2003,(2): 109-113 DOI：

摘要

介绍了一种基于体硅工艺的大尺寸、大深宽比梳状静电致动微夹持器的制作工艺。对微夹持器制作中的关键工艺进行分析

重点分析ICP蚀刻工艺的蚀刻时间对结构的影响

总结导致器件失效的原因

探讨了减少失效的方法。加工过程中采用分步加工的办法控制蚀刻时间

成功的释放了宽6μm

厚60μm

等效长度达5470μm的悬臂梁型微夹持臂。研制出一种良好性能的具有S形柔性结构夹持臂的梳状静电致动微夹持器。

Abstract

The fabrication process of a comb-drive electrostatically actuated microgripper based on silicon bulk micromachining is described in detail

with the effect of ICP etch time on structure analysed. Some factors causing microgripper failure identified

and advices provided for avoidance of failure. With a fractional ICP etch method used to control the etch time a gripper finger of 6 μm wide and 5 470 μm high was successfully released. A high aspect ratio microgripper with S-shaped flexible fingers has been developed.

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references

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薛实福,徐毓娴,李庆祥.原子力显微镜传感器的微机械加工技术的研究[J].光学精密工程,1997,5(4):43-49.XUE SH F, XU Y X, LI Q X. Investigation of microfabrication of the force sensor for the atomic force microscope[J].Optics and Precision Engineering,1997,5(4):43-49.(in Chinese)

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