Research on the control model of piezoelectric micropositioning actuator

QU Dong-sheng; RONG Wei-bin; SUN Li-Ning; XU Jing; CAI He-gao

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Research on the control model of piezoelectric micropositioning actuator

更新时间：2020-08-12

- Research on the control model of piezoelectric micropositioning actuator
- Optics and Precision Engineering Vol. 10, Issue 6, Pages: 602-607(2002)
- 作者机构：
  
  哈尔滨工业大学, 机器人研究所,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP224
- Received：17 April 2002，
  
  Revised：25 October 2002，
  
  Published Online：15 December 2002，
  
  Published：15 December 2002
- 稿件说明：
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曲东升, 荣伟彬, 孙立宁, 徐晶, 蔡鹤皋. 压电陶瓷微位移器件控制模型的研究[J]. 光学精密工程, 2002,(6): 602-607

QU Dong-sheng, RONG Wei-bin, SUN Li-ning, XU Jing, CAI He-gao. Research on the control model of piezoelectric micropositioning actuator[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 602-607
曲东升, 荣伟彬, 孙立宁, 徐晶, 蔡鹤皋. 压电陶瓷微位移器件控制模型的研究[J]. 光学精密工程, 2002,(6): 602-607 DOI：

QU Dong-sheng, RONG Wei-bin, SUN Li-ning, XU Jing, CAI He-gao. Research on the control model of piezoelectric micropositioning actuator[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 602-607 DOI：

摘要

从不同角度介绍了压电陶瓷微位移器件的两种控制模型.首先

借助于统计物理学分析

结合数学建模方法

建立了一个简单实用的压电陶瓷的迟滞数学模型.其次

借助于弹性体变形理论

介绍了压电/电致伸缩陶瓷的归一化控制模型

从理论上说明了采用电极化强度的方法可以有效减小迟滞的观点.并设计了两种实验系统

对两种控制模型进行了实验验证

实验结果表明

所建立的两种模型可有效减小压电陶瓷的迟滞非线性误差

提高压电陶瓷微位移的控制精度

有助于实现压电陶瓷驱动器的高精度开环微位移控制.

Abstract

Two control models for piezoelectric actuators are introduced from different angles. Firstly

by means of statistic physical analysis

a simple and practical mathematic formula describing the hysteresis of a piezoelectric actuator built by a mathematic modeling method. Then

based on elastic deformation theory

a normalization model of piezoelectric/electrostrictive effect is introduced. Accordingly

the viewpoint that hysteresis can be greatly reduced by polarization control method was proved theoretically. Two experimental systems were designed and two control models tested

respectively. Some experimental results show that the models are effective in decreasing the error arising from nonlinear hysteresis. In this way the micropositioning control accuracy of piezoelectric actuators can be improved. As a result

the research is helpful to realize high precision open loop micropositioning controls based on piezoelectric actuators.

关键词

Keywords

references

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Venkataraman R, Krishnaprasad P S. A novel algorithm for the invention of the preisach operator[J]. SPIE, 2000, 3984:404-414.

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杜正春, 李春梅, 颜景平.非线性迟滞现象的广义模型及其在压电微作动器中的应用[J].仪器仪表学报.1999,20(4):32-34.

姜风春, 刘端堂.循环滞回能的瞬态响应及数学模型[J].哈尔滨船舶工程学院学报,1994,15(3):65-71.

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Related Institution

School of Mechanical and Electrical Engineering, Guangzhou University

Center for Intelligent Equipment and Internet-connected Systems, Guangzhou University

College of Mechanical Engineering and Automation, Huaqiao University

Key Laboratory of Optoelectronic Technology and Systems of the Ministry of Education

Precision & Intelligence Laboratory, College of Optoelectronic Engineering, Chongqing University

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