Microwave measurement of the conductivity of conducting thin films

Y JU; Y HURISAWA; M SAKA

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Microwave measurement of the conductivity of conducting thin films

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- Microwave measurement of the conductivity of conducting thin films
- Optics and Precision Engineering Vol. 11, Issue 1, Pages: 59-61(2003)
- 作者机构：
  
  Department of Mechanical Engineering, Tohoku University, Aoba 01, Aramaki, Aoba-, Sendai ku,Japan,980-8579
- 作者简介：
- 基金信息：
- DOI：
  CLC： O484.5
- Received：17 September 2002，
  
  Revised：21 November 2002，
  
  Published Online：15 February 2003，
  
  Published：15 February 2003
- 稿件说明：
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Y JU, Y HURISAWA, M SAKA. Microwave measurement of the conductivity of conducting thin films[J]. 光学精密工程, 2003,(1): 59-61

Y JU, Y HURISAWA, M SAKA. Microwave measurement of the conductivity of conducting thin films[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 59-61
Y JU, Y HURISAWA, M SAKA. Microwave measurement of the conductivity of conducting thin films[J]. 光学精密工程, 2003,(1): 59-61 DOI：

Y JU, Y HURISAWA, M SAKA. Microwave measurement of the conductivity of conducting thin films[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 59-61 DOI：

摘要

A new method to measure the conductivity of conducting thin films in a contactle s s fashion was demonstrated. A microwave compact equipment working at 94 GHz was used to measure the amplitude of the reflection coefficient of the microwave sig na l. Indium Tin Oxide films having conductivity of 8.20×10

～8.02×10

S/m on the glass substrates were used as the samples. An evaluation equation was bui lt to determine the conductivity from the measured amplitude of the reflection c oefficient. The evaluated conductivity of conducting thin films agrees well with their actual value.

Abstract

～8.02×10

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references

WIEGENSTEIN C G,Schulz K H. Rev Sci Instrum, 1997,68:1812.

ERICKSON J W. Rev Sci Instrum, 1989,60:502.

ERICKSON A V,Hinch B J. Rev Sci Instrum, 1997,68:1571.

M麳LHAUS V, KANH Y. Rev Sci Instrum, 1991,62: 2465.

JU Y, HIROSAWA Y, SAKA M, et al.Conference Digest of the 27th International Conference on Infrared and Millimeter Waves, 2002:29.

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