YAMASHITA K, SERLEMITSOS P J, TUELLER J,et al. Supermirror hard-x-ray telescope[J]. Appl Opt, 1998, 37(34):8067-8073.

KOZHEVNIKOV I V, BUKREEVA I N, ZIEGLER E. Design of X-ray supermirrors[J]. Nuclear Institutes and Metheds in Physics Research,2001,A 460:424-443.

JIMENEZ-GARATE M A.Hailey W W.Christensen F E. Fabrication,performance, and figure metrology of epoxy-replicated aluminum foils for hard X-ray focusing multilayer-coated segmented conical optics[J].Opt Eng,2000,11:2982-2994.

PROTOPOPOV V V, KALNOV V A. X-ray multilayer mirrors with a extended angular range[J]. Optics Communications, 1998, 158:127-140.

YAMASHITA K, AKIYAMA K,HAGA K. et al.Fabrication and characterization of multilayer supermirrors for hard X-ray optics[J]. Journal of Synchrotron Radiation, 1998, ISSN: 0909-0495.

EBERHARD S. Soft X-ray optics [M]. SPIE, The International Society for optical Engineering: Bellingham, Washing ton USA:1994,108-115,173-174.

张俊平,曹健林,马月英,等.软X射线激光用多层膜反射镜的设计与性能模拟计算[J].光学学报1995,15(8):1088-1093.ZHANG J P, CAO J L, MA Y Y,et al. The design and performance simulation of multilayered mirrors for soft X-ray laser[J]. ACTA Optica Sinica,1995,15(8):1088-1093.(in Chinese)

唐晋发,郑权.应用薄膜光学[M].上海:上海科学技术出版社,1984.TANG J F, ZHENG Q. Applied thin film optics[M].Shanghai: Shanghai Science and Techolgoy Publishing Company,1984.(in Chinese)

WANG ZH SH,CAO J L,MICHETTE A G. Depth-graded multilayer X-ray optics with broad angular response[J].Optics Communications, 2000,177:25-32.

柯常军,王占山,郑咏梅,等.宽带平坦型软X射线多层反射膜的设计[J].光学精密工程,1999,7(3):19-22.KE CH J, ZHANG Y M, ZHANG T Q. The design of soft X-ray broadband and flat multilayer[J].Optic and Precision Engineering,1999,7(3):19-22.(in Chinese)

雷欧 S S.工程最优化原理与应用[M].北京:北京理工大学出版社,1990.213-219.RAO S S. Optimization theory and application[M]. Beijing: Institute of Technology Publishing Company,1990.213-219. (in Chinese)

PETFORD LONG A K, STEARNS M B, CHANG C H, et al. High resolution electron microscopy study of x-ray multilayer structures[J]. J Appl Phys, 1987,61(8):1422-1428.

金春水,王占山,曹健林,等.软X射线投影刻原理装置的设计[J].光学精密工程,2000,8(1):66-70.JIN CH SH, WANG ZH SH, CAO J L,et al. Development of elementary arrangement for soft X-ray projection lithography[J]. Optics and Precision Engineering,2000,8(1):66-70.(in Chinese)

STREARNS D G.The scattering of X-rays from nonideal multilayer structures[J]. J Appl Phys,1989,65(2):13-18.

柯常军,王占山,张铁强,等.软X射线多层膜的一种新型设计方法[J].光学精密工程,1997,7(4):17-20.KE CH J, WANG ZH SH, ZHANG T Q,et al.The design of multilayered mirros as reflector for soft X-ray random number[J].Optic and Precision Engineering,1999,7(4):17-20.(in Chinese)