Simulation and model analysis of MEMS

PAN Wu; ZHONG Xian-xin; LIU Ji-xue

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Simulation and model analysis of MEMS

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- Simulation and model analysis of MEMS
- Optics and Precision Engineering Vol. 11, Issue 1, Pages: 30-36(2003)
- 作者机构：
  
  1. 重庆大学, 微系统研究中心重庆,400044
  2. 重庆大学微系统研究中心重庆,400044
  3. 四川压电与声光技术研究所重庆,400060
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN47
- Received：17 September 2002，
  
  Revised：17 November 2002，
  
  Published Online：15 February 2003，
  
  Published：15 February 2003
- 稿件说明：
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潘武, 钟先信, 刘积学. 微机电系统(MEMS)的仿真和模型分析[J]. 光学精密工程, 2003,(1): 30-36

PAN Wu, ZHONG Xian-xin, LIU Ji-xue . Simulation and model analysis of MEMS[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 30-36
潘武, 钟先信, 刘积学. 微机电系统(MEMS)的仿真和模型分析[J]. 光学精密工程, 2003,(1): 30-36 DOI：

PAN Wu, ZHONG Xian-xin, LIU Ji-xue . Simulation and model analysis of MEMS[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 30-36 DOI：

摘要

微机电系统 (MEMS)器件及系统仿真正日益受到MEMS研究者的重视。其仿真内容涉及力学、电子学、热学、光学、流体学等许多学科。MEMS和其他微系统可看作为一个多域物理系统。本文从方法学观点讨论了建模方法、计算机辅助模拟工具、多域模型库以及不同仿真器的耦合问题。将电网络概念引入到不同域系统仿真中以及等效电路被应用到不同的物理域系统。对于系统模拟和仿真来说

元件模型库的建立非常重要

引入多端口元件

并用线性和非线性微分方程加以描述。另外

本文也简单分析了系统仿真中涉及的降阶问题、模型优化方法以及相关的仿真工具和仿真器间的耦合问题。

Abstract

The modelling method

computer-aided modellin g tools

multi-domain model libraries

and coupling different simulators are dis cussed from methodologic point of view. The electrical network concept is introd uced in t he simulation of different domain systems

in which equivalent circuits are appl ie d to physical quantities between different domain systems. The building of compo nent model libraries is considered because it is very important for the system m odelling and simulation. The multi-terminal port elements can be introduced and described by linear and nonlinear differential equations. In addition

the o rder reduction problem

model optimization methods

related simulation tools and the coupling between simulators are analyzed.

关键词

Keywords

references

SCHWARZ P, SCHNEIDER P. Model library and tool support for MEMS simulation, microelectronic and MEMS technology[J]. SPIE, 2001, 4407: 303-316.

SENTURIA S D. CAD Challenges for microsensors, microactuators, and microsystems[J]. Proc IEEE, 1998,86(8):1611-1626.

SENTURIA S D, ALURU N, WHITE J. Simulating the behavior of MEMS devices: computational methods and needs[J]. IEEE Computational Science and Engineering, 1997,(1): 30-54.

WACHUTKA G. Tailored modelling: a way to the virtual microtransducer fabrication[J]. Sensor and Actuators, 1995, A46-47: 603-612.

ZAMAN M H, BART S F, GILBERT J R. An environment for design and modelling of electromechanical microsystems[J]. J Modelling and Simulation of Microsystems, 1999, 1(1): 65-76.

NGUYEN C T C. Micromechanical resonators for oscillators and filters[A]. Proceedings of the 1995 IEEE International Ultrasonics Symposium[C]. Seattle, WA, 1995,7-10: 489-499.

潘武,钟先信,巫正中.无线通信系统中的微尺度射频元件[J].光学精密工程,2001,9(4):304-310.PAN W, ZHONG X X, WU ZH ZH. Microscale RF components in wireless communication system[J]. Optics and Precision Engineering, 2001,9(4):304-310.

CHEN Y, ZHONG X X, LI K. A MEMS CAD system based on CORBA[A]. International Symposium on Smart Structure and Microsystems (IS3M 2000)[C]. HongKong, 2000.

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