Doppler analysis for double-grating displacement measurement s ystem with nanometer resolution

SU Shao-jing; LIU Hui; LU Hai-bao; WANG Yue-ke

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Doppler analysis for double-grating displacement measurement s ystem with nanometer resolution

更新时间：2020-08-12

- Doppler analysis for double-grating displacement measurement s ystem with nanometer resolution
- Optics and Precision Engineering Vol. 11, Issue 1, Pages: 17-21(2003)
- 作者机构：
  
  国防科学技术大学, 机电工程与自动化学院,湖南长沙,410073
- 作者简介：
- 基金信息：
- DOI：
  CLC： O436.1
- Received：07 September 2002，
  
  Revised：13 November 2002，
  
  Published Online：15 February 2003，
  
  Published：15 February 2003
- 稿件说明：
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苏绍璟, 刘辉, 吕海宝, 王跃科. 纳米级位移分辨率双光栅系统的多普勒分析[J]. 光学精密工程, 2003,(1): 17-21

SU Shao-jing, LIU Hui, LU Hai-bao, WANG Yue-ke. Doppler analysis for double-grating displacement measurement s ystem with nanometer resolution[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 17-21
苏绍璟, 刘辉, 吕海宝, 王跃科. 纳米级位移分辨率双光栅系统的多普勒分析[J]. 光学精密工程, 2003,(1): 17-21 DOI：

SU Shao-jing, LIU Hui, LU Hai-bao, WANG Yue-ke. Doppler analysis for double-grating displacement measurement s ystem with nanometer resolution[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 17-21 DOI：

摘要

使用多普勒理论分析了一种典型的具有纳米级位移分辨率的双光栅测量系统.在以往的文献中

只是简单的列出光栅系统的位移测量公式

对系统的工作原理分析避而不谈.文中首先给出了系统的光路结构

分析了光栅的衍射序列

然后对光束入射和出射光栅的多普勒效应进行了数学建模

得到了最终的位移测量值与光学莫尔条纹之间的关系.最后分析了参考光栅的作用

并给出了这种系统的特点.

Abstract

Unlike other papers which listed the measuring equation only

and didn't touch t he operation principle

a double-grating displacement measurment system with a resolution of one nanometer is analyzed using Doppler theory in this paper. The optical structure of the gr a ting system is first shown in detail

the diffraction sequences are described in turn

a mathematic model of incident and emission light beam is then establishe d for Doppler effect

and finally the relationship between the displacement valu e and the corresponding Moir? signals is established with this model. The function of refere nce grating is ex plained

and the characteristics of this grating system are listed.

关键词

Keywords

references

SPIES A. Linear and angular encoders for the high-resolution range[A]. Proc of 9th IPES[C].Braunschweig Germany,1997.54-57.

WRONKOWSKI L. Diffraction model of an optoelectronic displacement measuring transducer[J].Optics and Laser Technology,1995,27(2):81-88.

DANIEL P. Analysis of Moire fringe multiplication phenomena[J].Applied Optics, 1967,6(11):1938-1942.

樊叔维. 任意槽形光栅衍射特性的矢量理论分析与计算[J].光学精密工程,2000,8(1):5-10.FAN SH W. Vecor theory analysis and numerical calculation for any shape profile dielectric gratings[J].Optics and Precision Engineering,2000,8(1):5-10.(in Chinese)

苏绍王景,吕海宝. 基于DSP的宽动态范围莫尔条纹计数与精密细分技术[J].光学精密工程,2001,9(2):146-150.SU SH J, LU H B. DSP based counting and ultra-precision subdivision of Moire signals with wide dynamic range[J].Optics and Precision Engineering,2001,9(2):146-150.(in Chinse)

苏绍王景. 大量程纳米级光栅位移测量理论及关键技术研究[D]. 长沙:国防科技大学,2001.SU SH J. Research on theory and key technologies of long-range displacement measuring with nanometer resolution by gratings[D]. Changsha: National University of Defense Technology,2001.(in Chinese)

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