Effect of film thickness errors on performance of soft X-ray multilayer

WANG Zhan-shan

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Effect of film thickness errors on performance of soft X-ray multilayer

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- Effect of film thickness errors on performance of soft X-ray multilayer
- Optics and Precision Engineering Vol. 11, Issue 2, Pages: 136-138(2003)
- 作者机构：
  
  同济大学, 精密光学工程技术研究所, 物理系上海,200092
- 作者简介：
- 基金信息：
- DOI：
  CLC： TB43
- Received：11 January 2003，
  
  Revised：21 February 2003，
  
  Published Online：15 April 2003，
  
  Published：15 April 2003
- 稿件说明：
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王占山. 膜厚控制误差对软X射线多层膜性能影响的分析[J]. 光学精密工程, 2003,(2): 136-138

WANG Zhan-shan. Effect of film thickness errors on performance of soft X-ray multilayer[J]. Editorial Office of Optics and Precision Engineering, 2003,(2): 136-138
王占山. 膜厚控制误差对软X射线多层膜性能影响的分析[J]. 光学精密工程, 2003,(2): 136-138 DOI：

WANG Zhan-shan. Effect of film thickness errors on performance of soft X-ray multilayer[J]. Editorial Office of Optics and Precision Engineering, 2003,(2): 136-138 DOI：

摘要

针对影响多层膜性能的关键因素———膜厚控制误差进行了全面的分析计算

指出影响多层膜性能的主要误差是仪器本身的系统偏差

它使多层膜的峰值反射波长偏离设计值

使得制作出的多层膜无法满足要求;镀膜过程中的随机误差使多层膜的反射率降低

但不影响多层膜峰值反射率波长的位置

因此

在制作多层膜过程中

不但要严格控制镀膜时的系统误差

而且要控制随机误差。

Abstract

The effect of film thickness control errors on the performance of soft X-ray multilayer is discussed in detail. The results show that the primary error is a systemic error of the instrument itself which causes the peak of reflectivity change and the secondary error is a stochastic error which control decreases the magnitude of reflectivity.

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references

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张俊平,曹健林,马月英,等. 软X光激光用多层膜反射镜的设计与性能模拟计算[J].光学学报, 1995,15(8):1089-1093.ZHANG J P, CAO J L, MA Y Y, et al. The design and performance simulation of multilayered mirrors for soft X-ray lasers[J].Acta Optica Sinica,1995,15(8):1089-1093.(in Chinese)

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