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Micro-machining system based on AFM
更新时间:2020-08-12
    • Micro-machining system based on AFM

    • Optics and Precision Engineering   Vol. 11, Issue 2, Pages: 125-129(2003)
    • CLC: TH742.9
    • Received:12 October 2002,

      Revised:18 January 2003,

      Published Online:15 April 2003,

      Published:15 April 2003

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  • XIA Jia-fei, SUN Tao, YAN Yong-da, LIANG Ying-chun, CHENG Kai, DONG Shen. Micro-machining system based on AFM[J]. Editorial Office of Optics and Precision Engineering, 2003,(2): 125-129 DOI:

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