Laser profilometer

SONG Kang; ZHAO Yu-long; JIANG Zhuang-de

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Laser profilometer

更新时间：2020-08-12

- Laser profilometer
- Optics and Precision Engineering Vol. 11, Issue 3, Pages: 245-249(2003)
- 作者机构：
  
  西安交通大学, 机械工程学院, 陕西, 西安, 710049
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH744.3
- Received：24 February 2003，
  
  Revised：25 March 2003，
  
  Published Online：15 June 2003，
  
  Published：15 June 2003
- 稿件说明：
移动端阅览
宋康, 赵玉龙, 蒋庄德. 激光干涉微轮廓测量仪[J]. 光学精密工程, 2003,(3): 245-249

SONG Kang, ZHAO Yu-long, JIANG Zhuang-de . Laser profilometer[J]. Editorial Office of Optics and Precision Engineering, 2003,(3): 245-249
宋康, 赵玉龙, 蒋庄德. 激光干涉微轮廓测量仪[J]. 光学精密工程, 2003,(3): 245-249 DOI：

SONG Kang, ZHAO Yu-long, JIANG Zhuang-de . Laser profilometer[J]. Editorial Office of Optics and Precision Engineering, 2003,(3): 245-249 DOI：

摘要

基于Michelson干涉仪测量原理研制的微轮廓测量仪

载物平台采用步进电机和压电陶瓷(PZT)两级闭环驱动与定位

步进电机用于快速粗定位和扩大测量范围

压电陶瓷用于精密定位

重复定位精度为10 nm;测量光路采用共干涉系统

对机械振动

温度漂移不敏感;测量范围20 mm×20 mm×0.4 mm

纵向分辨率为0.32 μm

横向分辨率为0.5μm.

Abstract

The laser profilometer based on the Michelson interferometry principle

has its platform driven by a stepper motor for fast rough position and expansion of measuring range

and by piezoelectric ceramic for precision positioning with a repetitive positioning accuracy of 10 nm. A common path interference system

which is not sensitive to mechanical vibration and temperature drift

is used in the measuring optical path. The laser profilometer has a measuring range of 20 mm×20 mm×0.4 mm

a longitudinal resolution of 0.32 μm

and a lateral resolution of 0.5 μm.

关键词

Keywords

references

王富生,谭久彬.表面微观轮廓的高分辨率光学测量方法[J].光学精密工程,2000,8(4):309-310.WANG F SH, TAN J B. Methods of high resolution optical measurement for surface profile [J]. Optics and Precision Engineering, 2000,8(4) :309-310. (in Chinese)

李文杰,张涛,黄伟.表面粗糙度、表面微观轮廓及微位移激光测量集成化方法的研究[J].四川大学学报,2000,32(6) :79-81.LI W J, ZHANG T, HUANG W. Research on elector optical integration of measuring surface roughness, surface micro-profile and micro-displacement by laser[J]. Journal of Sichuan University, 2000,32(6) :79-81. (in Chinese)

陈津平,张宝峰,胡小东,等.微型激光干涉仪应用于纳米测量机[J].测量与设备,2002,4:6-8.CHEN J P, ZHANG B F, HU X D, et al. Micro-Optical interferometry instrument in nanometer measurement device [J]. Measurement and Equipment, 2002,4:6-8. (in Chinese)

刘志俭,张志勇.MATLAB应用程序接口用户指南[M].北京:科学出版社.2001:335.LIU ZH J, ZHANG ZH Y. User guide of MATLAB application program interface [M]. BeiJing: Science Press.2001:335. (in Chinese)

周肇飞,张涛,周卫东,等.在线检测精细表面微观形貌的激光轮廓仪[J].光电工程,2001,28(2):7-10.ZHOU ZH F, ZHANG T, ZHOU W D, et al. A laser profilometer for on-line measuring microprofile of super-Fine surface [J]. Opto-Electron Engineering, 2001,28(2):7-10. (in Chines)

杨甬英,卓永模,杨明建.用于超光滑表面无损检测的光学轮廓仪[J].光电工程,1999,26(6):12-16.YANG Y Y, ZHUO Y M, YANG M J. An optical profiler used for nondestructive testing of ultra-smooth surface[J]. Opto-Electron Engineering, 2001,26(6): 12-16. (in Chinese)

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Related Institution

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Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences

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