Precision nanometrology of a large area microstructured metrology surface

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Precision nanometrology of a large area microstructured metrology surface

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- Precision nanometrology of a large area microstructured metrology surface
- Optics and Precision Engineering Vol. 11, Issue 3, Pages: 223-226(2003)
- 作者机构：
  
  Department of Mechatronics and Precision Engineering, Tohoku University Aramaki Aza Aoba 01, Sendai,Japan,98-8579
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Received：17 January 2003，
  
  Revised：12 March 2003，
  
  Published Online：15 June 2003，
  
  Published：15 June 2003
- 稿件说明：
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TAKESHI Araki, SATOSHI Kiyono. Precision nanometrology of a large area microstructured metrology surface[J]. 光学精密工程, 2003,(3): 223-226

WEI Gao, TAKESHI Araki, SATOSHI Kiyono . Precision nanometrology of a large area microstructured metrology surface[J]. Editorial Office of Optics and Precision Engineering, 2003,(3): 223-226
TAKESHI Araki, SATOSHI Kiyono. Precision nanometrology of a large area microstructured metrology surface[J]. 光学精密工程, 2003,(3): 223-226 DOI：

WEI Gao, TAKESHI Araki, SATOSHI Kiyono . Precision nanometrology of a large area microstructured metrology surface[J]. Editorial Office of Optics and Precision Engineering, 2003,(3): 223-226 DOI：

摘要

The authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages

[1]

. The surface encoder con-sists of two fundamental elements: a sinusoidalmicrostructured metrology surface

which is re-ferred to as the angle grid

and a two-dimension-al (2D) slope sensor

[2-3]

Abstract

The authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages

[1]

. The surface encoder con-sists of two fundamental elements: a sinusoidalmicrostructured metrology surface

which is re-ferred to as the angle grid

and a two-dimension-al (2D) slope sensor

[2-3]

关键词

Keywords

references

KIYONO S, CAI P, GAO W. An angle-based position detection method for precision machines[J]. JSME Int, J,1999,42-1:44-48.

GAO W, KIYONO S, SATOH E. Precision measurement of multi-degree-of-freedom spindle errors using two-dimensional slope sensors[J]. Annals of the CIRP, 2002,51-1 :447-450.

GAO W, HUANG P S. YAMADA T, et al. A compact and sensitive two-dimensioanl angle probe for flatness measurement of large silicon wafers[J]. Precision Engineering, 2002,26(4): 396-404.

PATTERSON S R, MAGRAB E B. Design and testing of a fast tool servo for diamond turning[J]. Precision Engineering, 1985,7(3) :123-128.

DOW T A, MILLER M H, FALTER P J. Application of a fast tool servo for diamond turning of nonrotationally symmetric surfaces[J]. Precision Engineering, 1991,13 (4): 233-250.

OKAZAKi Y. Fast tool servo system and its application to three dimensional fine figures. [A]. Proc of 13 th ASPE[C]. 1998. 100-103.

GAO W, HOCKEN R J, PATTEN J A, et al. Constructuion and testing of a nanomachining instruments [J].Precision Engineering , 2000,24(4): 320-328.

GAO W, HOCKEN R J, PATTERN J A, et al. Experiments using a nano-machining instrument for nano-cutting brittle materials[J]. Annals of the CIRP , 2000,49 (1): 439-442.

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