Theory, design, manufacture and measurement of aberration reducing gratings

ZHU Xiang-bing; FU Shao-jun; YE Wei-quan; HE Shi-ping; LIU Ying; XU Xiang-dong; HONG Yi-li

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Theory, design, manufacture and measurement of aberration reducing gratings

更新时间：2020-08-12

- Theory, design, manufacture and measurement of aberration reducing gratings
- Optics and Precision Engineering Vol. 11, Issue 4, Pages: 354-358(2003)
- 作者机构：
  
  1. 安徽师范大学, 物理系, 安徽, 芜湖, 241000
  2. 中国科学技术大学, 国家同步辐射实验室, 安徽, 合肥, 230029
  3. 中国科学技术大学, 工程科学学院, 安徽, 合肥, 230027
- 作者简介：
- 基金信息：
- DOI：
  CLC： O436.1
- Received：16 January 2003，
  
  Revised：01 April 2003，
  
  Published Online：15 August 2003，
  
  Published：15 August 2003
- 稿件说明：
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朱向冰, 付绍军, 叶为全, 何世平, 刘颖, 徐向东, 洪义麟. 消像差光栅的理论及实验研究[J]. 光学精密工程, 2003,(4): 354-358

ZHU Xiang-bing, FU Shao-jun, YE Wei-quan, HE Shi-ping, LIU Ying, XU Xiang-dong, HONG Yi-lin . Theory, design, manufacture and measurement of aberration reducing gratings[J]. Editorial Office of Optics and Precision Engineering, 2003,(4): 354-358
朱向冰, 付绍军, 叶为全, 何世平, 刘颖, 徐向东, 洪义麟. 消像差光栅的理论及实验研究[J]. 光学精密工程, 2003,(4): 354-358 DOI：

ZHU Xiang-bing, FU Shao-jun, YE Wei-quan, HE Shi-ping, LIU Ying, XU Xiang-dong, HONG Yi-lin . Theory, design, manufacture and measurement of aberration reducing gratings[J]. Editorial Office of Optics and Precision Engineering, 2003,(4): 354-358 DOI：

摘要

对消像差光栅进行了理论和实验研究。用光程函数和费马原理研究光栅的成像

用刻槽分布函数表示光栅的刻槽曲率及间距变化。对成像的理论分析表明光栅刻槽分布函数比刻槽间距更容易表达像差

给出了消像差光栅的表达形式。比较了SD、WFA、LPF等光栅的参数优化方法。探讨了消像差光栅密度的干涉测量法

设计了光路

对光栅密度进行了测量。

Abstract

Fermat's principle and light path functions were used to analyze the aberration of gratings. The groove pattern function was employed to express the curvature and groove space of aberration reducing gratings

and the dispersive system containing a single grating was discussed. The groove pattern function contains more information about the imaging properties of the grating than groove space

and there is no need to project the grooves. Several expressions of aberration reducing gratings are given. The design manufacture and measurement of aberration reduced gratings are discussed. And the gratings measured by interference.

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Keywords

references

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