Linear drive technology and its application to a magnetic levitation stage in the microelectronic field

SUN Bao-yu; LIANG Shu-qing; SONG Wen-rong; WANG Yan-feng; HE Hui-yang

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Linear drive technology and its application to a magnetic levitation stage in the microelectronic field

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- Linear drive technology and its application to a magnetic levitation stage in the microelectronic field
- Optics and Precision Engineering Vol. 11, Issue 4, Pages: 338-342(2003)
- 作者机构：
  
  1. 中国科学院, 长春光学精密机械与物理研究所, 吉林, 长春, 130022
  2. 长春工业大学, 机电学院,吉林长春,130012
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN403
- Received：16 January 2003，
  
  Revised：19 February 2003，
  
  Published Online：15 August 2003，
  
  Published：15 August 2003
- 稿件说明：
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孙宝玉, 梁淑卿, 宋文荣, 王延风, 何惠阳. 直线驱动磁悬浮进给机构的研究[J]. 光学精密工程, 2003,(4): 338-342

SUN Bao-yu, LIANG Shu-qing, SONG Wen-rong, WANG Yan-feng, HE Hui-yang. Linear drive technology and its application to a magnetic levitation stage in the microelectronic field[J]. Editorial Office of Optics and Precision Engineering, 2003,(4): 338-342
孙宝玉, 梁淑卿, 宋文荣, 王延风, 何惠阳. 直线驱动磁悬浮进给机构的研究[J]. 光学精密工程, 2003,(4): 338-342 DOI：

SUN Bao-yu, LIANG Shu-qing, SONG Wen-rong, WANG Yan-feng, HE Hui-yang. Linear drive technology and its application to a magnetic levitation stage in the microelectronic field[J]. Editorial Office of Optics and Precision Engineering, 2003,(4): 338-342 DOI：

摘要

分析了传统机械进给机构的特点

设计了一种集磁悬浮和线性驱动技术为一体的精密进给平台机构

此机构采用直线同步电机对悬浮的平台机构提供驱动力。这种驱动方式避免了传统驱动方式造成的摩擦、弹性变形、滞后和非线性误差

实现了平台进给机构在水平和垂直两方向的无接触支撑和导向。针对磁悬浮平台进给机构设计了直线同步电机的结构

并对直线电机产生的磁力进行分析计算。直线驱动技术在磁悬浮平台进给机构中的应用使进给系统具有响应快速、刚度高以及定位精确的特点

能够满足微电子设备高精度、高效率和超洁净加工的需要。

Abstract

Having analyzed the features of the conventional mechanical drive mechanism

a new kind of precision positioning stage is presented in this paper

which adopts both magnetic levitation and linear drive technologies. This drive mechanism provides power with a linear synchronous motor avoiding friction

elastic distortion

hysteresis and non linear error

and can realize non contact support and guidance in the horizontal and vertical directions. The structure of the linear synchronous motor for the drive mechanism was designed

and its magnetic force was analyzed and calculated. The application of the linear drive technology in the driving mechanism makes the system respond quickly and be posited accurately. With characteristics of high stiffness

high accuracy and high efficiency

the driving mechanism can meet the needs of high accuracy and high efficiency at super clean condition in the micro electron manufacturing field.

关键词

Keywords

references

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