Adaptive alignment of fixed mirror by phase detection

YU Li-min; DAI Zuo-xiao; WANG Mo-chang; SHI Zhi-hua

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Adaptive alignment of fixed mirror by phase detection

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- Adaptive alignment of fixed mirror by phase detection
- Optics and Precision Engineering Vol. 11, Issue 5, Pages: 448-452(2003)
- 作者机构：
  
  中国科学院, 上海技术物理研究所, 上海, 200083
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH744.1
- Received：17 April 2003，
  
  Revised：24 July 2003，
  
  Published Online：15 October 2003，
  
  Published：15 October 2003
- 稿件说明：
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于立民, 代作晓, 王模昌, 施志华. 相位检测法定镜自适应校正技术[J]. 光学精密工程, 2003,(5): 448-452

YU Li-min, DAI Zuo-xiao, WANG Mo-chang, SHI Zhi-hua. Adaptive alignment of fixed mirror by phase detection[J]. Editorial Office of Optics and Precision Engineering, 2003,(5): 448-452
于立民, 代作晓, 王模昌, 施志华. 相位检测法定镜自适应校正技术[J]. 光学精密工程, 2003,(5): 448-452 DOI：

YU Li-min, DAI Zuo-xiao, WANG Mo-chang, SHI Zhi-hua. Adaptive alignment of fixed mirror by phase detection[J]. Editorial Office of Optics and Precision Engineering, 2003,(5): 448-452 DOI：

摘要

为保持傅里叶变换光谱仪在动镜运动和外界震动等恶劣条件下动镜和定镜间的准直性

采用了相位检测法检测准直性误差的定镜自适应校正技术。介绍了相位检测法的基本原理和实现自适应校正的途径以及自适应校正系统的基本结构。采用高速压电倾斜镜作为驱动补偿元件

分析了相位检测精度对校正精度的影响。实验结果表明

采用自适应校正后系统干涉效率明显提高。

Abstract

In order to keep the dynamic alignment Fourier transform spectrometer (FTS) between the moving mirror and the fixed mirror while the mirrors are moving and the temperature is changing

a phase detecting method is proposed for magnitude and tilt direction. The structure of dynamic alignment system and the basic principle of the phase detection are discussed. Fast steering mirror is adopted in the self-alignment system. The features and structure of the fast steering mirror are detailed. Alignment results show that dynamic alignment has obvious effects on performance.

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references

于立民. 傅里叶变换光谱仪自适应校正系统的研究[J]. 红外,2001,12:1-11.YU L M. Adaptive alignment system on Fourier transform spectrometer[J]. Infrared, 2001,12:1-11.(in Chinese)

周仁忠,阎吉祥,俞信,等.自适应光学[M].北京:国防工业出版社, 1996.ZHOU R ZH, YAN J X, et al. Adaptive optics[M]. Beijing:National Defence Industry Publishing House, 1996.(in Chinese)

MACOY N H, BROBERG H. Dynamic alignment design and assessment for scanning interferometers[J]. SPIE, 1996, 2832:126-154.

郭红卫,陈明仪. 相移器平移误差与倾斜误差不敏感相移新算法[J]. 光学精密工程, 2000,8(2):185-188.GUO H W, CHEN M Y. New algorithm insensitive to the piston and tilt errors of reference mirror for phase stepping interferometer[J]. Optics and Precision Engineering, 2000,8(2):185-188.(in Chinese)

尤德裴. 数字化测量技术[M].北京:机械工业出版社,1980.YOU D P. Digital measuring technology[M]. Beijing: Publishing House of Machinery Industry, 1980.(in Chinese)

凌宁,陈东红,官春林,等. 两维高速压电倾斜反射镜[J].光电工程, 1995,22(1):151-160.LING N, CHEN D H. Two-dimension piezoelectrical fast steering mirror [J]. Opto-Electronic Engineering,1995,22(1):51-60.(in Chinese)

叶露. 主动调节刚性支撑薄膜型反射镜面形调整机构的研究[J]. 光学精密工程,2002,10(2):201-204.YE L. Micro-move devices for supporting and adjusting large membrane mirrors[J]. Optics and Precision Engineering, 2002,10(2):201-204.(in Chinese)

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