Present state and perspectives of micromachined inertial sensors

LIU Wei; XIE Xu-hui; LI Sheng-yi

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Present state and perspectives of micromachined inertial sensors

更新时间：2020-08-12

- Present state and perspectives of micromachined inertial sensors
- Optics and Precision Engineering Vol. 11, Issue 5, Pages: 425-431(2003)
- 作者机构：
  
  长沙国防科技大学, 湖南, 长沙, 410073
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212
- Received：28 May 2003，
  
  Revised：10 July 2003，
  
  Published Online：15 October 2003，
  
  Published：15 October 2003
- 稿件说明：
移动端阅览
刘危, 解旭辉, 李圣怡. 微机械惯性传感器的技术现状及展望[J]. 光学精密工程, 2003,(5): 425-431

LIU Wei, XIE Xu-hui, LI Sheng-yi. Present state and perspectives of micromachined inertial sensors[J]. Editorial Office of Optics and Precision Engineering, 2003,(5): 425-431
刘危, 解旭辉, 李圣怡. 微机械惯性传感器的技术现状及展望[J]. 光学精密工程, 2003,(5): 425-431 DOI：

LIU Wei, XIE Xu-hui, LI Sheng-yi. Present state and perspectives of micromachined inertial sensors[J]. Editorial Office of Optics and Precision Engineering, 2003,(5): 425-431 DOI：

摘要

对微机械惯性传感器—微加速度计和微陀螺的技术现状进行了评述。根据其不同的技术实现

诸如制造过程、工作原理、控制系统、接口技术等对其进行了分类描述。这些微传感器的用途很广

而且相对于其传统器件来说有低成本、小尺寸、低功耗等特点

正在全世界范围内被广泛研究。最后

对微机械传感器领域的一些新的进展进行了讨论

并提出了展望。

Abstract

A review is given to the present state of micromachined inertial sensor-micro-accelerometers and micro-gyro. These sensors have a number of significant advantages

such as lower cost

smaller form factor and lower power consumption. Their manufacturing process

transfer mechanism

control system and interface technique are described in detail.

关键词

Keywords

references

KRAFT, M. Closed loop accelerometer employing oversampling conversion[D].Coventry University, Ph.D. dissertation, 1997.

BOSER B E,HOWE R T. Surface micromachined accelerometers[J]. IEEE J Solid-State Circuits,1996,31(3):336-375.

Analog Devices.ADXL05 - monolithic accelerometer with signal conditioning[Z]. 1995.

SEIDEL H, FRITSCH U, GOTTINGER R, et al. A piezoresistive silicon accelerometer with monolithically integrated CMOS-circuitry[A]. Tech Dig 8th Int Conf Solid-State Sensors and Actuators (Transducers'95)[C]. Stockholm,Sweden,1995,597-600.

ROCKSTAD H K, TANG T K, REYNOLD S. A miniature, high-sensitivity, electron tunneling accelerometer[J]. Sensors and Actuators, 1996,53:227-231.

BURNS D W, HORNING R D, HERB W R, et al. Sealed-cavity resonant microbeam accelerometer[J]. Sensors and Actuators, 1996,A53:249-255.

SPINEANU A, BENABES P, KIELBASA R. A piezoelectric accelerometer with sigma-delta servo technique[J]. Sensors and Actuators, 1997,A60,127-133.

LEMKIN M A, BOSER B. A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics[J]. IEEE J Solid-State Circuits, 1999,34(4),456-468.

XUESONG J, SEEGER J I, KRAFT M, et al. A monolithic surface micromachined Z-axis gyroscope with digital output[A]. To be Published at the Symposium on VLSI Circuits[C]. Hawaii, USA, 2000.

KRAFT M. Micromachined inertial sensors state of the art and a look into the future[EB/OL].http://www.sensor.com/

ROYLANCE L M, ANGELL J B. A batch-fabricated silicon accelerometer[J]. IEEE Trans Electron Devices, 1979,ED-26:1911-1917.

KRAFT M, LEWIS C P, HESKETH T G. Closed loop silicon accelerometers[J]. IEE Proceedings-Circuits, Devices and Systems, 1998,145(5):325-331.

LEMKIN M A. Micro accelerometer design with digital feedback control[D].University of California, Berkeley, Ph.D. dissertation, 1997.

de COULON Y, SMITH T, HERMANN J. Design and test of a precision servo accelerometer with digital output[A]. 7th Int Conf Solid-State Sensors and Actuators (Transducer '93)[C]. Yokohama, 1993.

FUKATSU K, MURAKOSHI T, ESASHI M. Electrostatically levitated micro motor for inertia measurement system[A]. Transducer '99[C]. 1999.

RUDOLF F, JORNOD A,BENCZE P. Silicon microaccelerometers[A]. 4th Int Conf Solid-State Sensors and Actuators (Transducers'87)[C]. Tokyo, Japan, 1987, 376-379.

RUDOLF F, JORNOD A, BERQOVIST J. Precision accelerometers with g resolution[J]. Sensors Actuators,1990,A21-A23,297-302.

HENRION W, DISANZA L, TERRY M Ip S, et al. Wide-dynamic range direct digital accelerometer[A]. Solid-State Sensors and Actuators Workshop[C], Hilton Head Island, SC, 1990, 153-156.

SHERMAN S J, TSANG W K, CORE T A. A low-cost monolithic accelerometer: Product/technology update[A]. IEEE Electron Devices Meeting (IEDM'92)[C]. Dec. 1992,160-161.

RISTIC L, GUTTERIDGE R, KUNG J. A capacitive type accelerometer with self-test feature based on a double-pinned polysilicon structure[A]. 7th Int Conf Solid-State Sensors and Actuators (Transducers'93)[C]. Yokohama, Japan, June 1993, 810-812.

LEMKIN M, BOSER B, SMITH J. A 3-axis surface micromachined accelerometer[A]. Solid State Circuits Conf (ISSCC'97)[C]. San Francisco, CA, Feb. 1997, 202-203.

BERNSTEIN J, CHO S, KING A T. A micromachined comb-drive tuning fork rate gyroscope[A]. IEEE Micro Electro Mechanical Systems Workshop (MEMS'93)[C]. Fort Lauderdale, FL,1993, 143-148.

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