Role of Al layer in metallic-dielectric multiplayer

WEI Jun-ming; WU Yong-gang; GU Mu; GU Chun-shi; MA Xiao-hui; WANG Li; LIN Xiao-yan; CHEN Li

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Role of Al layer in metallic-dielectric multiplayer

更新时间：2020-08-12

- Role of Al layer in metallic-dielectric multiplayer
- Optics and Precision Engineering Vol. 12, Issue 1, Pages: 122-125(2004)
- 作者机构：
  
  1. 同济大学, 波耳固体物理研究所, 上海, 200092
  2. 同济大学, 精密光学工程技术研究所, 上海, 200092
- 作者简介：
- 基金信息：
- DOI：
  CLC： O484.8
- Received：21 May 2003，
  
  Revised：12 November 2003，
  
  Published Online：15 February 2004，
  
  Published：15 February 2004
- 稿件说明：
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魏军明, 吴永刚, 顾牡, 顾春时, 马晓辉, 王利, 林小燕, 陈玲燕. 多层金属/介质膜系中Al层的作用分析[J]. 光学精密工程, 2004,(1): 122-125

WEI Jun-ming, WU Yong-gang, GU Mu, GU Chun-shi, MA Xiao-hui, WANG Li, LIN Xiao-yan, CHEN Ling-yan. Role of Al layer in metallic-dielectric multiplayer[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 122-125
魏军明, 吴永刚, 顾牡, 顾春时, 马晓辉, 王利, 林小燕, 陈玲燕. 多层金属/介质膜系中Al层的作用分析[J]. 光学精密工程, 2004,(1): 122-125 DOI：

WEI Jun-ming, WU Yong-gang, GU Mu, GU Chun-shi, MA Xiao-hui, WANG Li, LIN Xiao-yan, CHEN Ling-yan. Role of Al layer in metallic-dielectric multiplayer[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 122-125 DOI：

摘要

设计了一维金属/介质多层膜系

膜系由几个周期的高折射率(Al

)/低折射率(MgF

)材料所组成.在低折射率材料中插入金属层(Al)

对膜系进行了优化

利用电子束蒸发方法制备了该膜系.实验表明

不仅Al层的总厚度直接影响透射谱的形状

在同样Al层总厚度情况下

Al层厚度分布对膜系也有影响.寻找到了最佳Al层分布结果

并通过了实验验证

制备出了能很好抑止BaF2晶体发射光谱的长波成分的膜系.

Abstract

A one dimensional metallic-dielectric multilayer coating was designed to suppress the long wavelength component in the emission spectrum of BaF

crystal

while the short wavelength component is allowed to pass. The coating was composed of several periods of high(Al

)/low(MgF

)refractive index materials inserted in the metallic layer(Al). The multilayer coating was optimized and the effect of layer thickness error was estimated. The effect of thickness and distribution of the metallic layers was emphatically discussed. The multilayer coating was prepared through electron beam evaporation and the experiment results were in very good agreement with the calculated results.

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references

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王占山. 膜厚控制误差对软X射线多层膜性能影响的分析[J].光学精密工程, 2003,11(2):136-138. WANG ZH S. Effect of film thickness errors on performance of soft X-ray multilayer[J]. Optics and Precision Engineering, 2003,11(2):136-138.(in Chinese)

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