NC surfacing of two off-axis aspheric mirrors

ZHENG Li-gong; ZHANG Xue-jun; ZHANG Feng

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NC surfacing of two off-axis aspheric mirrors

更新时间：2020-08-12

- NC surfacing of two off-axis aspheric mirrors
- Optics and Precision Engineering Vol. 12, Issue 1, Pages: 113-117(2004)
- 作者机构：
  
  1. 中国科学院, 长春光学精密机械与物理研究所光学技术研究中心, 吉林, 长春, 130033
  2. 吉林大学, 吉林, 长春, 130022
- 作者简介：
- 基金信息：
- DOI：
  CLC： TQ171.684
- Received：20 June 2003，
  
  Revised：14 November 2003，
  
  Published Online：15 February 2004，
  
  Published：15 February 2004
- 稿件说明：
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郑立功, 张学军, 张峰. 矩形离轴非球面反射镜的数控加工[J]. 光学精密工程, 2004,(1): 113-117

ZHENG Li-gong, ZHANG Xue-jun, ZHANG Feng. NC surfacing of two off-axis aspheric mirrors[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 113-117
郑立功, 张学军, 张峰. 矩形离轴非球面反射镜的数控加工[J]. 光学精密工程, 2004,(1): 113-117 DOI：

ZHENG Li-gong, ZHANG Xue-jun, ZHANG Feng. NC surfacing of two off-axis aspheric mirrors[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 113-117 DOI：

摘要

针对离轴TMA结构空间相机中使用的两块离轴非球面反射镜的加工过程

提出了一种新型的矩形离轴非球面的最接近球面半径的求解及其优化方法

并且开发了基于计算机虚拟加工技术的CCOS工艺参数计算方法.被加工工件分别为165mm×100mm的矩形凸面离轴非球面和770mm×200mm的矩形轻量化凹面离轴非球面

设计精度分别为任意100mm

200mm子孔径面形精度优于0.025λRMS(λ=632.8nm).经检验

工件的加工精度满足了设计要求

分别达到了0.023λRMS和0.013λRMS.

Abstract

A new way of solving and optimizing a best-fit sphere is proposed for surfacing and testing of two off-axis mirrors. A virtual fabrication program was developed for determination of CCOS CNC process parameters. The two off-axis aspheric mirrors surfaced are a convex mirror with an aperture of 165 mm×100 mm and a lightweighted concave mirror with an aperture of 770 mm×200 mm

and the design accuracies required for these two off-axis mirrors are better than 0.025 λ RMS with λ=632.8 nm over any 100 nm or 200 nm diameter sub-aperture. Inspections showed that the finish accuracies of convex and concave mirrors satisfied the design requirements

and they reached 0.023 λ RMS and 0.013 λ RMS respectively.

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Keywords

references

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