Design of beam delivery system for RF CO2 laser ceramic substrate scriber

HOU Lian-ping; CHEN Pei-feng; WANG Wei

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Design of beam delivery system for RF CO₂ laser ceramic substrate scriber

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- Design of beam delivery system for RF CO₂ laser ceramic substrate scriber
- Optics and Precision Engineering Vol. 12, Issue 1, Pages: 37-42(2004)
- 作者机构：
  
  1. 中国科学院, 半导体研究所, 国家光电子工艺中心北京,100083
  2. 华中科技大学, 激光工程研究院,湖北武汉,430074
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG665
- Received：20 September 2003，
  
  Revised：29 November 2003，
  
  Published Online：15 February 2004，
  
  Published：15 February 2004
- 稿件说明：
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侯廉平, 陈陪峰, 王圩. 射频CO2激光陶瓷基板划片机光路设计及分析[J]. 光学精密工程, 2004,(1): 37-42

HOU Lian-ping, CHEN Pei-feng, WANG Wei. Design of beam delivery system for RF CO2 laser ceramic substrate scriber[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 37-42
侯廉平, 陈陪峰, 王圩. 射频CO2激光陶瓷基板划片机光路设计及分析[J]. 光学精密工程, 2004,(1): 37-42 DOI：

HOU Lian-ping, CHEN Pei-feng, WANG Wei. Design of beam delivery system for RF CO2 laser ceramic substrate scriber[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 37-42 DOI：

摘要

介绍了RFCO

激光陶瓷基板划片的特点.分析了导光系统的设计原则

着重讨论了圆偏振镜和伽利略离焦望远镜的作用和特点.对导光系统进行了优化和模拟

给出了导光系统的光路图及成像质量图.试验结果和理论相符

系统划片速度可达10m/min

划缝宽度

0.1mm

划缝深度

0.3mm.利用所设计的陶瓷划片机加工的氧化铝陶瓷基片可与国外同类划片机相媲美.

Abstract

The current requirements for laser ceramic substrate scriber systems are high light beam quality

fast scribing velocity

narrow scribing groove

small heat-affected zone

smooth cross-section

and independence of scribing quality from scribing direction. The light guide system designed can satisfy all the above-mentioned requirements

and it includes anamorphic lens

space filter

circular polarizer

Galileo defocusing telescope and focusing lens

and it has a scribing velocity of up to 10 m/min

a scribing width of less than 0.1 mm

and a scribing depth of more than 0.3 mm.

关键词

Keywords

references

COLLEY A D, BAKER H J, HALL D R.Planar waveguide, 1 kW cw, carbon dioxide laser excited by a single transverse rf discharge[J]. Appl Phy Lett,1992,61(2):136-138.

UDALOV Y B, TSKHAI S N,PETERS P J M,et al. Witteman RF excited gas lasers-recent progress[C].Gas Laser-Recent Developments and Future Prospects,1996,5(3):73-88.

SPACHT D P, DEMARIA A J. The design of sealed CO2 lasers continues to improve[J].Laser Focus World, 2001,6(2):123-127.

浜崎正信,陈敬之.实用激光加工[M].北京:机械工业出版社,1992,192-193.HASAKI, CHEN J ZH.The practical laser processes[M].Beijing: Machine Industry Press,1992,192-193.(in Chinese)

吕百达.激光光束学[M].成都:四川大学出版社,1992,105-107.LU B D. Laser optics[M].Chengdu:Sichuang University Press,1992,105-107.(in Chinese)

魏光辉,朱宝亮.激光束光学[M].北京:北京工业学院出版社,1988,201-202.WEI G H, ZHU B L.Laser beam optics[M]. Beijing: Beijing Industry College Press,1988,201-202.(in Chinese)

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