2D-Platform with cross diffraction grating as displacement measurement sensor

WANG Xuan-ze; GUO Jun; XIE Tie-bang

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2D-Platform with cross diffraction grating as displacement measurement sensor

更新时间：2020-08-12

- 2D-Platform with cross diffraction grating as displacement measurement sensor
- Optics and Precision Engineering Vol. 11, Issue 5, Pages: 492-496(2003)
- 作者机构：
  
  华中科技大学, 机械学院仪器系,湖北武汉,430074
- 作者简介：
- 基金信息：
- DOI：
  CLC： TG806
- Received：15 April 2003，
  
  Revised：01 August 2003，
  
  Published Online：15 October 2003，
  
  Published：15 October 2003
- 稿件说明：
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王选择, 郭军, 谢铁邦. 以正交衍射光栅为计量标准器的二维微位移工作台[J]. 光学精密工程, 2003,(5): 492-496

WANG Xuan-ze, GUO Jun, XIE Tie-bang. 2D-Platform with cross diffraction grating as displacement measurement sensor[J]. Editorial Office of Optics and Precision Engineering, 2003,(5): 492-496
王选择, 郭军, 谢铁邦. 以正交衍射光栅为计量标准器的二维微位移工作台[J]. 光学精密工程, 2003,(5): 492-496 DOI：

WANG Xuan-ze, GUO Jun, XIE Tie-bang. 2D-Platform with cross diffraction grating as displacement measurement sensor[J]. Editorial Office of Optics and Precision Engineering, 2003,(5): 492-496 DOI：

摘要

提出以正交衍射光栅作为

X-Y

二维位移工作台计量标准器的思想

阐述了正交衍射光栅作为大量程二维位置检测传感器的工作原理及光路布置方法

推导了光栅运动位移与所产生干涉条纹的相移之间的关系。介绍了工作台粗、细两级定位系统的组成结构:粗定位部分由磁悬浮平面直线电机驱动

细定位部分采用弹性铰支结构并由压电陶瓷驱动;通过分别对电机和压电陶瓷驱动范围与定位精度的分析

提出对工作台精密快速定位的方法。设计了一套对电机与压电陶瓷进行驱动控制和光栅信号进行处理的电路

并结合实际正交衍射光栅的刻线精度

计算了工作台位置检测的有效分辨率。最后

分析了当前几种典型压电陶瓷驱动电路的特点

提出选用直流放大电源的方式作为本系统高压驱动方法

并给出了高压驱动电路图。

Abstract

The platform consists of coarse and fine stages

and the coarse stage is driven by a plane linear motor while the fine one by piezoelectric ceramics. The method of fast location control is proposed according to the driving range and precision of motors and piezoelectric ceramics. A circuit was designed to process grating signals to drive motor piezoelectric ceramics. The actual resolution of position measurement was computed from the practical precision of grating grid. Direct current amplification was chosen by analyzing a few high voltage circuits to drive these ceramics.

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Keywords

references

HOLMES M,HOCKEN R, TRUMPER D. The long-range scanning stage: a novel platform for scanned-probe microscopy[J]. Precision Engineering,2000,(24):191-209.

米凤文,戴旭涵,沈亦兵. 精密工作台定位控制系统的设计与研究[J]. 光学仪器,1999,20(5):18-22.MI F W, DAI X H, SHEN Y B. Design and research on the precision worktables positioning control system[J]. Optical Instruments,1999,20(5):18-22.(in Chinese)

李江国,王立鼎. 小型精密X-Y工作台误差的理论分析及补偿[J]. 光学精密工程,1995,3(4):87-92.LI J G, WANG L D.Theoretical analysis and compensation of errors of miniature fine X-Y worktable[J]. Optics and Precision Engineering, 1995,3(4):87-92.(in Chinese)

王立松,苏宝库,董申,等. 大行程高精度级定位工作台的控制方法研究[J]. 机械设计与制造,2001,4:71-72.WANG L S, SU B K, DONG SH,et al. The research of the large travel and high precision two-level table[J]. Machinery Design & Manufacture,2001,4:71-72.(in Chinese)

TRAUNTEUT A T. Technology and applications of grating interferometers in high-precision measurement[J]. Precision Engineering,1992,14(3):147-154.

蒋向前,肖少军,谢铁邦,等.光栅技术在纳米测量中的应用[J]. 仪器仪表学报,1995,16(1):374-378.JIANG X Q,XIAO SH J,XIE T B,et al. Application of grating in nanometer measurement[J]. Chinese Journal of Scientific Instrument, 1995,16(1):374-378. (in Chinese)

邓开发,陈洪,是度芳,等.激光技术与应用[M]. 长沙:国防科技大学出版,2001.DENG K F,CHEN H,SHI D F,et al. Laser technology and application[M]. Changsha: National Defence University of Science and Technology, 2001.(in Chinese)

许慧斌,张小波,宾鸿赞.基于PC总线的位置测量与电机控制卡[J]. 电子与自动化,1999,28(3):14-17.XU H B,ZHANG X B,BIN H Z. PC-bus based position measuring and motor control I/Ocard[J]. Electronics & Automation, 1999,28(3):14-17.(in Chinese)

冯晓光,赵万生,栗岩,等. 压电陶瓷微位移器驱动电源及减小其纹波的方法[J]. 压电与声光,1997,19(1):35-38.FENG X G, ZHAO W SH, LI Y,et al. Power supply for piezoelectric actuators and a method of abating ripple voltage[J].Piezoelectrics & Acoustooptics,1997,19(1):35-38.(in Chinese)

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