Method of calculating negative pressure-and-adsorption air cushion annular slide

ZHANG Xing-xiang; REN Jian-yue

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Method of calculating negative pressure-and-adsorption air cushion annular slide

更新时间：2020-08-12

- Method of calculating negative pressure-and-adsorption air cushion annular slide
- Optics and Precision Engineering Vol. 11, Issue 5, Pages: 481-486(2003)
- 作者机构：
  
  中国科学院, 长春光学精密机械与物理研究所, 吉林, 长春, 130022
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH703.4
- Received：08 April 2003，
  
  Revised：09 July 2003，
  
  Published Online：15 October 2003，
  
  Published：15 October 2003
- 稿件说明：
移动端阅览
张星祥, 任建岳. 负压吸附式环形气垫导轨的计算方法[J]. 光学精密工程, 2003,(5): 481-486

ZHANG Xing-xiang, REN Jian-yue. Method of calculating negative pressure-and-adsorption air cushion annular slide[J]. Editorial Office of Optics and Precision Engineering, 2003,(5): 481-486
张星祥, 任建岳. 负压吸附式环形气垫导轨的计算方法[J]. 光学精密工程, 2003,(5): 481-486 DOI：

ZHANG Xing-xiang, REN Jian-yue. Method of calculating negative pressure-and-adsorption air cushion annular slide[J]. Editorial Office of Optics and Precision Engineering, 2003,(5): 481-486 DOI：

摘要

根据负压吸附导轨的工作原理

利用流体力学的性质

系统地建立了导轨的承载能力和气膜厚度的数学模型

得出4个结构参数、气源气压与承载能力和气膜厚度的关系。最后通过实验证明了该导轨气膜厚度在1～3μm时

刚度稳定

最大变化量约为10%

且计算刚度与试验刚度的误差小于12%

能够适用于高精密器械的移动元件或承载元件。

Abstract

Negative pressure adsorption slide is a new air static pressure slide widely used for high precision

high speed and light load applications. A systematical mathematic model has been established in the light of the operating principle

and hydromechanics load-carrying capacity and gas film thickness of the slide. Some conclusions are drawn on four structural parameters

gas source pressures

load-carrying capacity and gas thickness

and finally

the slide's performance was verified through experiments. When gas thickness varies in 1～3 μm

the load-carrying capacity is stable

maximal variation is about 10%

and the error between calculating stiffness and experimental stiffness is less than 12%. So

this slide can be used for mobile components or bearing components of precise appliances.

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Keywords

references

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