Principle and application of miniature aspheric surface profilometer

NI Ying; YU Jing-Chi; GUO Pei-ji; DING Ze-zhao

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Principle and application of miniature aspheric surface profilometer

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- Principle and application of miniature aspheric surface profilometer
- Optics and Precision Engineering Vol. 11, Issue 6, Pages: 612-616(2003)
- 作者机构：
  
  苏州大学, 现代光学技术研究所,江苏苏州,215006
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH741.3
- Received：12 May 2003，
  
  Revised：20 October 2003，
  
  Published Online：15 December 2003，
  
  Published：15 December 2003
- 稿件说明：
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倪颖, 余景池, 郭培基, 丁泽钊. 小型非球面轮廓测量仪的原理及应用[J]. 光学精密工程, 2003,(6): 612-616

NI Ying, YU Jing-chi, GUO Pei-ji, DING Ze-zhao. Principle and application of miniature aspheric surface profilometer[J]. Editorial Office of Optics and Precision Engineering, 2003,(6): 612-616
倪颖, 余景池, 郭培基, 丁泽钊. 小型非球面轮廓测量仪的原理及应用[J]. 光学精密工程, 2003,(6): 612-616 DOI：

NI Ying, YU Jing-chi, GUO Pei-ji, DING Ze-zhao. Principle and application of miniature aspheric surface profilometer[J]. Editorial Office of Optics and Precision Engineering, 2003,(6): 612-616 DOI：

摘要

介绍了自行研制的FLY-I非球面轮廓仪的设计以及测量软件数学模型

其实用精度为1～2 μm.光学元件的抛光精度取决于精磨精度

本实验室现有的LOH高精度铣磨机床经过对第1次精磨后的光学元件面形进行修正

2次精磨后其精磨精度可达到2 μm.研究了这一非球面轮廓仪以配合LOH铣磨机床

测量得到1次精磨后的面形误差数据

经过误差反馈进行2次精磨

以保证光学元件的精磨精度.通过多次实验以及数据处理、分析

证明自行设计、装调的非球面轮廓仪达到了设计的精度要求

可满足实验室

光学加工车间对小型非球面精磨阶段面形的检测要求

即精磨面形误差在2 μm以内

同时也可直接用于中低精度非球面光学元件的最终检测.

Abstract

A miniature aspheric surface profilometer with a usable accuracy of 1～2 μm was designed and assembled to compensate the LOH SPHEROMATIC 50SL in our lab to ensure the grinding precision of optics. Experiments and analyses proved that the miniature aspheric surface profilometer meets the testing requirements of laboratory and optical shop for surface finishing

and it is suitable for final testing of optical elements with medium and low accuracy requirements.

关键词

Keywords

references

蒋剑峰,何永辉,赵万生.表面三维微观形貌检测技术及其发展[J].中国机械工程,1999,10(12):1418-1420.JIANG J F, HE Y H, ZHAO W SH. Surface 3D micro topography measurement technology and its development[J].China Mechanical Engineering, 1999,10(12):1418-1420.(in Chinese)

王富生,谭久彬.表面微观轮廓的高分辨率光学测量方法[J].光学精密工程,2000,8(4):309-315.WANG F SH,TAN J B.Methods of high resolution optical measurement for surface profile[J]. Optics and Precision Enginerring,2000,8(4):309-315.(in Chinese)

张学军,张云峰,余景池,等.FSGJ-1非球面自动加工及在线检测系统[J].光学精密工程,1997,5(2):70-76.ZHANG X J, ZHANG Y F, YU J CH, et al.FSGJ-1 aspheres automatic fabrication and on-line testing system[J]. Optics and Precision Engineering, 1997,5(2):70-76.(in Chinese)

杨力.先进光学制造技术[M].北京:科学出版社,2001.326-327.YANG L. Advanced optical manufacturing technology[M]. Beijing:Science Press, 2001.326-327.(in Chinese)

张以谟.应用光学[M].北京:机械工业出版社,1982,169-171.ZHANG Y M.Applied Optics[M].Beijing: Mechanical Industrial Press, 1982.169-171.(in Chinese)

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Graduate University of Chinese Academy of Sciences, Beijing 100039, China

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