Improvement of PZT phase shifter in vibration-resistant phase-shifting interferometer

WU Dong; ZHU Ri-hong; CHEN Lei; HE Yong; WANG Qing; GAO Zhi-shan

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Improvement of PZT phase shifter in vibration-resistant phase-shifting interferometer

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- Improvement of PZT phase shifter in vibration-resistant phase-shifting interferometer
- Optics and Precision Engineering Vol. 11, Issue 6, Pages: 567-571(2003)
- 作者机构：
  
  1. 南京理工大学, 电光学院, 江苏, 南京, 210094
  2. 解放军镇江船艇学院, 教研部, 江苏, 镇江, 212003
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH744.3
- Received：12 April 2003，
  
  Revised：26 October 2003，
  
  Published Online：15 December 2003，
  
  Published：15 December 2003
- 稿件说明：
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吴栋, 朱日宏, 陈磊, 何勇, 王青, 高志山. 抗振型移相干涉仪中PZT移相器的改进[J]. 光学精密工程, 2003,(6): 567-571

WU Dong, ZHU Ri-hong, CHEN Lei, HE Yong, WANG Qing, GAO Zhi-shan. Improvement of PZT phase shifter in vibration-resistant phase-shifting interferometer[J]. Editorial Office of Optics and Precision Engineering, 2003,(6): 567-571
吴栋, 朱日宏, 陈磊, 何勇, 王青, 高志山. 抗振型移相干涉仪中PZT移相器的改进[J]. 光学精密工程, 2003,(6): 567-571 DOI：

WU Dong, ZHU Ri-hong, CHEN Lei, HE Yong, WANG Qing, GAO Zhi-shan. Improvement of PZT phase shifter in vibration-resistant phase-shifting interferometer[J]. Editorial Office of Optics and Precision Engineering, 2003,(6): 567-571 DOI：

摘要

结合移相式干涉仪主动抗振技术

提出对普通PZT光学移相器进行机械结构的优化

改善其机械响应性能并保证有足够的位移量.作为机电反馈式干涉仪抗振系统的核心部件

改进后的PZT构件用于干涉仪的移相驱动

同时又用作光学相位调制器和振动补偿器.经移相干涉仪的在线测量

PZT移相器达到了1 000 Hz(振动幅度为λ/2)以上的时间响应速度并获得了6 μm左右的位移量

满足了干涉抗振系统的需要.

Abstract

The structure of an ordinary piezoelectric transducer (PZT) used as an optical phase-shifter is optimized using the active vibration-resistance techniques for phase-shifting interferometer to improve its mechanical properties with adequate micro-displacement. As the kernel part of a mechano-electronic feedback system of the vibration-resistant interferometer

the optimized PZT works as an optical phase-modulator and a vibration-compensated controller at the same time. On-line testing shows the new structure of PZT phase shifter has gained a time response above 1 000 Hz at amplitude of (/2

and a displacement of about 6 μm.

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Keywords

references

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KOPIOPOULOS C L. Simultaneous phase shift interferometer[J]. SPIE, 1991, 1513:119-127.

NORTH-MORRIS M B,van DELDEN J, JAMES C W. Phase-shifting birefringent scatter plate interferometer[J]. Appl Opt, 2002,41(4):668-677.

COLE G C, JAMES H B, LEE R D. Vibration stabilization of a phase shifting interferometer for large optics[J]. SPIE, 1997,3134:438-446.

FRESCHI A A, FREJLICH J. Adjustable phase control in stabilized interferometry[J]. Opt Lett, 1995,20(6): 635-637.

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朱日宏, 王青, 陈磊,等. 移相干涉技术中移相器的自校正方法[J]. 光学学报, 1998, 18(7): 932-937.ZHU R H, WANG Q, CHEN L, et al. A self-correcting method of phase shifter in phase shifting interferometry[J]. Acta Optica Sinica, 1998,18(7): 932-937.(in Chinese)

于瀛洁, 韦春龙, 陈明仪. 移相式数字波面干涉仪中的几个问题[J]. 光学精密工程,2001,9(6): 584 -587.YU Y J, WEI CH L, CHEN M Y. Technical problems in digital phase-stepping flatness interferometers[J]. Optics and Precision Engineering, 2001, 9(6): 584 -587(in Chinese)

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