Calibration of soft X-ray detector

CAO Ji-hong; NI Qi-liang; CHEN Bo

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Calibration of soft X-ray detector

更新时间：2020-08-12

- Calibration of soft X-ray detector
- Optics and Precision Engineering Vol. 12, Issue 1, Pages: 118-121(2004)
- 作者机构：
  
  中国科学院, 长春光学精密机械与物理研究所, 吉林, 长春, 130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN366
- Received：22 November 2003，
  
  Revised：04 December 2003，
  
  Published Online：15 February 2004，
  
  Published：15 February 2004
- 稿件说明：
移动端阅览
曹继红, 尼启良, 陈波. 用Si光电二极管标定软X射线探测器[J]. 光学精密工程, 2004,(1): 118-121

CAO Ji-hong, NI Qi-liang, CHEN Bo. Calibration of soft X-ray detector[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 118-121
曹继红, 尼启良, 陈波. 用Si光电二极管标定软X射线探测器[J]. 光学精密工程, 2004,(1): 118-121 DOI：

CAO Ji-hong, NI Qi-liang, CHEN Bo. Calibration of soft X-ray detector[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 118-121 DOI：

摘要

为了实现软X射线波段光源相对光谱分布的测量

引进了一种利用新型软X射线波段传递标准探测器—Si光电二极管对软X射线探测器进行标定.标定了软X射线波段光谱测量实验中常用的探测器—通道电子倍增器在放大电压为1.3kV时的量子效率

并对实验结果进行了分析

得出在8～30nm波段内探测器标定误差为5.7%～8.9%.

Abstract

In order to measure the relative spectrum distribution of soft X-ray source

it is proposed to calibrate the channel electron multiplier(CEM)using a silicon transfer standard photodiode calibrated by NIST. The quantum efficiency of the CEM has been determined using the calibration method proposed while CEM was biased to 1.3 kV. The analysis of calibration results indicates that the calibration error of CEM is 11%～17% in the 8～30 nm region.

关键词

Keywords

references

FONCK R J.Low noise photodiode detector for optical fluctuation diagnostics[J]. Rev Sci Instr,1992,63:4924-4926.

EPPELDAUER G, HARDIS J E. Fourteen-decade photocurrent measurement with large-area silicon photodiodes at room temperature[J].Appl Opt,1991,30:3091-3099.

FARNIKOVA M. Absolute measurement of soft X-ray emission by laser plasma using thermoluminescent dosimeters and semiconductor detectors[J]. SPIE,1996,2762:113.

WINICK M. Synchrotron Radiation Sources[Z].1994.

RYC L. Application of silicon photodiode for studying X-ray emission from picosecond plasma[C]. International Symposium Plasma,2001.

曹继红,尼启良,巩岩.虚拟仪器实现极紫外波段光谱数据采集和处理[J].光学精密工程,2002,10(6增):103-106.CAO J H, NI Q L, CONG Y,et al. Data acquisition and processing in EUV with labview program[J].Optics and Precision Engineering,2002,10(6增):103-106.(in Chinese)

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Related Institution

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