Micro-drive positioning system based on PZT and its control

SUN Li-ning; SUN Shao-yun; QU Dong-sheng; CAI He-gao

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Micro-drive positioning system based on PZT and its control

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- Micro-drive positioning system based on PZT and its control
- Optics and Precision Engineering Vol. 12, Issue 1, Pages: 55-59(2004)
- 作者机构：
  
  哈尔滨工业大学, 机器人研究所,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP242
- Received：14 August 2003，
  
  Revised：20 November 2003，
  
  Published Online：15 February 2004，
  
  Published：15 February 2004
- 稿件说明：
移动端阅览
孙立宁, 孙绍云, 曲东升, 蔡鹤皋. 基于PZT的微驱动定位系统及控制方法的研究[J]. 光学精密工程, 2004,(1): 55-59

SUN Li-ning, SUN Shao-yun, QU Dong-sheng, CAI He-gao. Micro-drive positioning system based on PZT and its control[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 55-59
孙立宁, 孙绍云, 曲东升, 蔡鹤皋. 基于PZT的微驱动定位系统及控制方法的研究[J]. 光学精密工程, 2004,(1): 55-59 DOI：

SUN Li-ning, SUN Shao-yun, QU Dong-sheng, CAI He-gao. Micro-drive positioning system based on PZT and its control[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 55-59 DOI：

摘要

介绍了基于PZT驱动的一维微动工作台.该微动台采用柔性平行板铰链机构

对其进行了出力和位移关系的分析

并且进行了ANSYS的有限元分析设计

求得了系统的固有频率和最大位移.其理论分析、有限元计算和试验测试结果的对比分析的一致性说明了理论分析的正确性和数值分析的可靠性.使用精密光栅进行微位移闭环检测

使用哈工大博实精密测控公司研制的压电陶瓷驱动电源.采用单神经元自适应PID控制算法对系统进行控制

单神经元具有自学习和自适应能力

而且结构简单易于计算;而传统的PID调节器也具有结构简单、调整方便和参数整定与工程指标联系密切等特点.推导了单神经元自适应PID控制器

并进行了实验

微位移为20μm时的响应时间为12ms

实验证明了该方法的有效性.

Abstract

An ID micro-drive table actuated by PZT

which has a parallel board framework

is described in detail

and the relationship between its thrust force and displacement is analyzed and validated with ANSYS simulation and experimental results. The system is controlled by a neuron adaptive PID controller

which features self-learning and adaptability

and easy calculation for simple structure

and the experiments made with the neuron adaptive PID controller indicate that the method proposed is effective

and the response time for a micro displacement of 20 μm is 12 ms.

关键词

Keywords

references

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ISHIKAWA Y, KITAHARA T.Present and future of micromechatronics[C].IEEE International Symposium on Micromechatronics and Human Science.Nagoya,Japan.1997:13-20.

MARUO S, IKUTA K.New microstereolithography(super-IH process)to create D freely movable micromechanism without sacrificial layer technique[C].IEEE International Symposium on Micromechatronics and Human Science,Nagoya,Japan.1998:115-120.

AKITA S.Micromachine technology development and its applications[C].IEEE International Symposium on Micromechatronics and Human Science.Nagoya,J.1998:17-22.

Montané E, Miribel P, Puig-Vidal M,et al.High voltage smart power circuits to drive piezoceramic actuators for micro robotic applications[C].Proceedings of DCIS 2000. Montpellier, 2000:668-673.

陶永华.新型PID控制及其应用[M].北京:机械工业出版社,2002,11.160-170.TAO Y H. New PID control and application[M].Beijing: Book Concern of Machine Industry(in Chinese)

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