High performance irregular multi-layer coating machine

ZHANG Quan; SU Zhe-xiang; CHEN Geng-hui; WU Chang-fa

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High performance irregular multi-layer coating machine

更新时间：2020-08-12

- High performance irregular multi-layer coating machine
- Optics and Precision Engineering Vol. 12, Issue 3, Pages: 335-339(2004)
- 作者机构：
  
  1. 华中科技大学, 光电子工程系,湖北武汉,430074
  2. 福州康顺光通讯有限公司, 福建, 福州, 350014
- 作者简介：
- 基金信息：
- DOI：
  CLC： TB43
- Received：03 December 2003，
  
  Revised：14 February 2004，
  
  Published Online：15 June 2004，
  
  Published：15 June 2004
- 稿件说明：
移动端阅览
张泉, 苏哲湘, 陈耿晖, 吴长发. 高质量非规整多层膜自动制备的研究[J]. 光学精密工程, 2004,(3): 335-339

ZHANG Quan, SU Zhe-xiang, CHEN Geng-hui, WU Chang-fa. High performance irregular multi-layer coating machine[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 335-339
张泉, 苏哲湘, 陈耿晖, 吴长发. 高质量非规整多层膜自动制备的研究[J]. 光学精密工程, 2004,(3): 335-339 DOI：

ZHANG Quan, SU Zhe-xiang, CHEN Geng-hui, WU Chang-fa. High performance irregular multi-layer coating machine[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 335-339 DOI：

摘要

为解决专门制备DWDM薄膜滤光片的LeyboldAPS 1104DWDM镀膜机制备包含几十层膜层的非规整膜系存在一定困难的问题

分析了非规整膜系光控曲线中关键区产生的原因

认为这是触发点位置与非理想环境因素共同作用造成触发点漂移产生的结果.误差校正功能的实现与监控曲线的走值趋势密切相关

曲线必须存在理论触发点和至少一个拐点.实验结果表明

采用准规整膜系设计方法能有效避免关键区的危害

同时充分发挥误差校正的功能.利用该镀膜机在精度、灵敏度和算法等方面的优势

设计出了与其配套的膜系

成功地制备了各种高性能薄膜滤光片.

Abstract

Leybold APS 1104 DWDM is a coating machine specially designed for coating DWDM thin film filter

and it has the difficulty in coating non-QWOT films consisting of multi-decades layers. Through in depth analysis of its characteristics

some design methods are suggested for coating QWOT film. By using these methods

coating high performance thin film filters is finally achieved.

关键词

Keywords

references

唐晋发,顾培夫.薄膜光学与技术[M].北京:机械工业出版社,1987.TANG J F,GU P F. Thin film optics and technology [M]. Beijing:Machine Industry Press, 1987.

WILLEY R R. Achieving narrow bandpass filter which meet the requirements for DWDM[J]. Thin Solid Films,2001, 398-399(11):1-9.

HERRMANN PZOLLER A. Automated optical coating processes[J]. SPIE, 1986, 652:2-9.

WILLEY R R. Improved repeatability in the production of periodic thin film structures by the use of steering with optical monitoring[C]. SVC- 36st Annual Technical Conference Proceeding. Albuquerque: Society of Vacuum Coaters, 1993. 156-162.

ZHAO F. Monitoring of periodic multilayers by the level method[J]. Appl Opt, 1985,24(20):3339-3342.

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