Design of RF MEMS resonator components based on cavity structure

LI Ying-liang; PAN Wu

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Design of RF MEMS resonator components based on cavity structure

更新时间：2020-08-12

- Design of RF MEMS resonator components based on cavity structure
- Optics and Precision Engineering Vol. 12, Issue 3, Pages: 298-304(2004)
- 作者机构：
  
  重庆邮电学院, 微光机电研究所重庆,400065
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH703
- Received：29 November 2003，
  
  Revised：07 February 2004，
  
  Published Online：15 June 2004，
  
  Published：15 June 2004
- 稿件说明：
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李应良, 潘武. 基于腔结构的射频微机械谐振元件的设计[J]. 光学精密工程, 2004,(3): 298-304

LI Ying-liang, PAN Wu. Design of RF MEMS resonator components based on cavity structure[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 298-304
李应良, 潘武. 基于腔结构的射频微机械谐振元件的设计[J]. 光学精密工程, 2004,(3): 298-304 DOI：

LI Ying-liang, PAN Wu. Design of RF MEMS resonator components based on cavity structure[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 298-304 DOI：

摘要

对圆柱形复合腔结构微机械谐振元件进行了设计研究

提出了一种基于柱形腔结构的微机械复合谐振元件的设计方法

并对其结构及特性进行了研究.建立了复合腔结构的电磁场数学方程

腔体基于体微机械微细加工技术实现工艺设计

最后对该元件进行了仿真分析.TM010模式下

谐振腔谐振频率为24.313299GHz

Q值为3529.707890

考虑微带耦合时仿真出复合谐振元件的最佳谐振频率为24.75GHz.仿真实验结果和理论值的平均误差不到1%

两者吻合得很好

说明了该设计的可行性.进一步改变结构参数

可获取不同谐振频率的器件

且可在腔体中填充高介电常数介质来减小器件的谐振频率

克服了以往使用腔体结构在低频段时体积过大等问题.

Abstract

The structure and performance of a complex cavity Micro-Electro-Mechanical-System resonator are analyzed with its electromagnetism equations established. Its fabrication was realized by built micromachining

and the structure is simulated on computer at the end. A micro machined-cavity resonator was designed with a TM

010

resonance quality factor of 3 529.707890 at 24.313299 GHz. When the micro-strip coupling conditions are considered

the best guess for the highest eigen frequency would be 24.75 GHz

and the average error of theoretical results and simulated results is less than 1%. The simulation results are in very good agreement with the theoretical value and this testifies the feasibility of the design. The structure parameters of the component are further varied

to obtain multivarious frequency components. The resonance frequency of a component is reduced by filling high permittivity medium

and this makes it possible to keep the design of a component compact at low frequency even.

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Keywords

references

李勇,李玉和,李庆祥,等.体硅工艺静电致动微夹持器的试验研究[J].光学精密工程,2003,11(1):1-5.LI Y, LI Y H, lI Q X,et al. Electrostatically actuated microgripper based on silicon bulk micromachining[J]. Optics and Precision Engineering, 2003,11(1): 1-5.(in Chinese)

KIM CH W, SONG I, SONG C,et al. A micromachined cavity resonator for millimeter-wave oscillator applications [J]. Sensors and Actuators, 2000,83(1-3): 1-5.

巫正中,钟先信,李晓毅,等.微机械多层短接式蓝牙天线[J].光学精密工程,2001,9(6):572-575.WU Z H ZH,ZHONG X X, LI X Y,et al. Multilayer-shorted micromachined Bluetooth antenna[J]. Optics and Precision Engineering, 2001,9(6):572 575.

CLARK J R, HSU W H, NGUYEN C T C. High-Q VHF micromechanical contour-mode disk resonator[C]. Technical Digest, IEEE Iht Electron Devices Meeting, San Francisco, California. 2000. 493-496.

卢国铭,姜遵富,黄伟嘉译.微波器件和电路[M].北京:科学出版社,1987.94-103.LU G M,JIANG Z F, HUANG W J. Microwave devices and circuits[M]. Beijing: Science Press, 1987.94-103. in Chinese)

陈国瑞.工程电磁场与电磁波[M].西安:西北工业大学出版社,1998.224-232.CHEN G R. Electromagnetic field and wave of engineering [M]. Xi′an: Northwestern Ploytechnical University Press, 1998. 224-232.(in Chinese)

李英编.电磁介质谐振器理论与应用[M].北京:电子工业出版社,1988.259-265.LI Y. The theories and applications of electromagnetism medium resonators[M]. Beijing:Publishing House of Electronics Industry, 1988. 259-265.(in Chinese)

Chi CH Y,Rebeiz G M. Conductor-loss limited stripline resonator and filters[J]. IEEE Transactions on Microwave Theory and Techniques, 1996,44(4): 626-629.

Don L DeVoe,Piezoeletric thin film micromechanical beam resonators[J]. Sensorand Actuators A,2001,88(3):263-272.

王子宇,张肇仪,徐承和.射频电路设计-理论与应用[M].北京:电子工业出版社,2002.375-378.WANG Z Y. ZHANG ZH Y, XU CH H. RF circuit design:theory and applications[M]. Beijing: Publishing House of Electronics Industry. 2002. 375-378.(in Chinese)

白向钰,吴苏,鹿安理,等.陶瓷材料微波加工用高均匀多模谐振腔的研究[J].清华大学学报,1998,38(2):37-39.BAI X Y,WU S,LU AN L, et al. Study on the multimode cavity with high uniformity used for microwave processing of ceramics[J]. Journal of Tsinghua University, 1998,38(2): 37-39.(in Chinese)

张立国,陈迪,杨帆,等.SU-8胶光刻工艺研究[J].光学精密工程,2002,10(3):266-270.ZHANG L G,CHEN D, YANG F,et al. Research on SU-8 resist photolithograph process[J]. Optics and Precision Engineering, 2002,10(3):266-270.(in Chinese)

李呈德,万盈,陈涛,等.准分子激光直刻微加工制作微机械[J].中国科学(E),2001,31(1):14-19.LI CH D,WAN Y,CHEN T. Excimer laser direct writing micro-machining micromechanism[J]. Science in China(Series E),2001,31(1): 14-19(in Chinese)

STICKEL M, ELEFTHERIADES G V, KREMER P. A high-Q bulk micromachined silicon cavity resonator at Ka-band[Z]. Accepted for Publication in Electronic Letters.

JOHN P, CHENG J CH, Linda P B. A micromachined high- X-band resonator[J]. IEEE Microwave and Guided Wave Letters, 1997,7(6): 168-170

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