Observation and measurement system for microstructure based on three-direction fiber illumination

ZHANG Lin; CHEN Tao; LIU Shi-bing; ZUO Tie-chuan

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Observation and measurement system for microstructure based on three-direction fiber illumination

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- Observation and measurement system for microstructure based on three-direction fiber illumination
- Optics and Precision Engineering Vol. 12, Issue 3, Pages: 275-281(2004)
- 作者机构：
  
  北京工业大学, 激光工程研究院激光微技术实验室北京,100022
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH703
- Received：24 December 2003，
  
  Revised：14 February 2004，
  
  Published Online：15 June 2004，
  
  Published：15 June 2004
- 稿件说明：
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张麟, 陈涛, 刘世炳, 左铁钏. 采用三向光纤照明成像的三维微结构观测系统[J]. 光学精密工程, 2004,(3): 275-281

ZHANG Lin, CHEN Tao, LIU Shi-bing, ZUO Tie-chuan. Observation and measurement system for microstructure based on three-direction fiber illumination[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 275-281
张麟, 陈涛, 刘世炳, 左铁钏. 采用三向光纤照明成像的三维微结构观测系统[J]. 光学精密工程, 2004,(3): 275-281 DOI：

ZHANG Lin, CHEN Tao, LIU Shi-bing, ZUO Tie-chuan. Observation and measurement system for microstructure based on three-direction fiber illumination[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 275-281 DOI：

摘要

为弥补普通光学显微镜照明系统的不足

针对一般三维微结构的显微成像

提出并设计了一个可实现实时调节的三向光纤照明成像观测系统.系统采用计算机、D/A卡、驱动电路等硬件以及自主研制的控制软件

实现对任一光源的光强进行稳定连续的实时调节.通过自主设计的机械结构将光源、光纤、耦合头以及显微镜连接为一整体

实现光束入射方向、入射角和入射距离的任意调节.与通常的底部透射光照明系统进行实验比较

成像质量显著提高

不仅可以清晰观察目标对像的表面结构

还能得到立体感强的三维图像.针对面阵CCD显微测量系统的标定和标定误差问题

提出了螺旋微缝标定法.将螺旋测微计两铁钻形成的微缝作为标定的样本

配以适当的观测手段和计算方法

有效地消除或减小了各种误差

提高了系统的标定精度.通过系统标定和测量比较

系统的标定精度达到±0.0015μm

测量精度达到±1μm.实验结果表明

螺旋微缝标定法可以基本满足CCD测量系统标定的要求.

Abstract

This paper introduces a new three direction illumination system with light intensity

angle of incidence and distance of incidence precisely real-time regulated is proposed for observation of 3D microstructure of MEMS. Three-dimensional images and the surface of the microstructure can be achieved by using this system. In the process of designing the surface matrix CCD micro-measurement system

calibration errors have a direct effect on the measurement accuracy of the system. A new method

which is simpler

faster

more convenient and more applicable than the traditional method

is proposed to calibrate and reduce calibration errors. The calibration accuracy of the system is up to(±0.0015)μm and its measurement accuracy is up to ±1 μm. This system is suitable for calibration at the level of micron.

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Keywords

references

WILKENING Dr G. Measuring methods for the determination of geometrical quantities of micro part[C]. Proceedings of Symposium on Nano-metrology in Precision Engineering, 1998,11(24): 68-75.

王向军,王峰.显微精密成像与微型机械尺寸检测技术[J].光学精密工程,2001,9(6):511-513.WANG X J,WANG F. Study of micro mechanical size inspection technology by microscope precision digital image [J]. Optics and Precision Engineering, 2001,9(6): 511-513.(in Chinese)

李智,王向军.微机电系统测试技术及方法[J].光学精密工程,2003,11(1):37-44.LI ZH,WANG X J. MEMS measurement technologies and methods[J]. Optics and Precision Engineering, 2003,11(1):37-44.(in Chinese)

吴一辉,贾宏光,王立鼎.微观测试技术及其发展应用[J].光学精密工程,1998,6(2):15-17.WU Y H,JIA H G,WANG L D. Micromeasurement development and application[J]. Optics and Precision Engineering, 1998,6(2):15-17.(in Chinese)

王庆有.CCD应用技术[M].天津:天津大学出版社,2000.WANG Q Y. The CCD applied technology[M]. Tianjin:Tianjin University Press, 2000.

孙学珠,王庆有.高精度CCD尺寸自动检测系统的光学系统设计[J].光学技术,1995,9(5):29-34.SUN X ZH,WANG Q Y. The design of optical system for high precision CCD automatic size control[J]. OpticalTechnology, 1995,9(5): 29-34.(in Chinese)

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