Wavelet transform and its application in extraction of micro-resonator motion track features

JIN Cui-yun; LI Da-chao; JIN Shi-jiu; FENG Ya-lin; LI Yi-bo; HAO Yi-long

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Wavelet transform and its application in extraction of micro-resonator motion track features

更新时间：2020-08-12

- Wavelet transform and its application in extraction of micro-resonator motion track features
- Optics and Precision Engineering Vol. 12, Issue 3, Pages: 282-286(2004)
- 作者机构：
  
  1. 天津大学, 精密测试技术及仪器国家重点实验室天津,300072
  2. 北京大学微电子学研究院, 北京, 100871
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH703
- Received：15 December 2003，
  
  Revised：16 February 2004，
  
  Published Online：15 June 2004，
  
  Published：15 June 2004
- 稿件说明：
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金翠云, 栗大超, 靳世久, 冯亚林, 李一博, 郝一龙. 小波变换及其在MEMS谐振器运动轨迹的特征提取中的应用[J]. 光学精密工程, 2004,(3): 282-286

JIN Cui-yun, LI Da-chao, JIN Shi-jiu, FENG Ya-lin, LI Yi-bo, HAO Yi-long . Wavelet transform and its application in extraction of micro-resonator motion track features[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 282-286
金翠云, 栗大超, 靳世久, 冯亚林, 李一博, 郝一龙. 小波变换及其在MEMS谐振器运动轨迹的特征提取中的应用[J]. 光学精密工程, 2004,(3): 282-286 DOI：

JIN Cui-yun, LI Da-chao, JIN Shi-jiu, FENG Ya-lin, LI Yi-bo, HAO Yi-long . Wavelet transform and its application in extraction of micro-resonator motion track features[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 282-286 DOI：

摘要

为测量微电机械系统(MEMS)谐振器的动态特性参数

根据MEMS谐振器运动图像的特点

将小波变换应用于MEMS谐振器运动轨迹的特征提取中.基于模糊图像合成技术

利用小波变换对MEMS谐振器的模糊运动图像进行了增强及降噪处理

并结合传统的图像处理方法

提取MEMS谐振器的运动轨迹

最终获得了MEMS谐振器的特性参数

从而可为MEMS器件的设计提供重要参考.实验结果表明

利用小波变换的方法获得了更好的测量精度

测量重复性误差为100nm.

Abstract

According to the characteristics of micro-resonator motion images

wavelet transform is used to extract the micro-resonator motion track features. Based on the blur image synthetic technique

wavelet transform was applied to enhance and abate noise of blur micro-resonator motion images

while the traditional image processing method is used to extract the motion track features

and finally the natural parameter of micro-resonator was acquired as important reference for MEMS design. In comparison with traditional image processing method

wavelet transform method has better measurement resolution

and its measurement repetition error is 100 nm.

关键词

Keywords

references

李路明,王立鼎.MEMS研究的新进展-微型系统及其发展应用的研究[J].光学精密工程,1997,5(1):68-73.LI L M,WANG L D. Microsystem and its development and applications[J]. Optics and Precision Engineering,1997,5(1):68-73.(in Chinese)

REMBE C, KANT R, MULLER R S. Optical measurement methods to study dynamic behavior in MEMS[C]. Microsystems Engineering :Metrology and Inspection. Bellingham(USA):Proc SPIE,2001. 127-137.

BURNS D J, HELBIG H F. A system for automatic electrical and optical characterization of microelectromechanical devices[J]. J Microelectrom ech Syst, 1999,8(4):473-482.

李智,王向军.微机电系统测试技术及方法[J].光学精密工程,2003,11(1):37-44.LI ZH, WANG X J. MEMS measurement technologies and methods[J]. Optics and Precision Engineering, 2003,11(1):37-44.(in Chinese)

杨福生.小波变换的工程分析与应用[M].北京:科学出版社,1999.1-12.YANG F SH. Project analysis and application of wavelet transform [M]. Beijing: Science Press, 1999. 1-12.(in Chinese)

董汉丽.基于小波变换的图像增强方法研究[J].郑州纺织工学院学报,1999,10(3):40-43.DONG H L. The study of the method of reinforcing picture based on the wavelet transforms[J]. Journal of Zhengzhou Tertile Institute, 1999,10(3):40-43.(in Chinese)

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