Application of Zemax software in alignment of three-mirror off-axis aspherical optical system

YANG Xiao-fei; ZHANG Xiao-Hui; HAN Chang-Yuan

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Application of Zemax software in alignment of three-mirror off-axis aspherical optical system

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- Application of Zemax software in alignment of three-mirror off-axis aspherical optical system
- Optics and Precision Engineering Vol. 12, Issue 3, Pages: 270-274(2004)
- 作者机构：
  
  中国科学院, 长春光学精密机械与物理研究所, 国家光学机械质检中心, 吉林, 长春, 130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH703
- Received：17 November 2003，
  
  Revised：18 February 2004，
  
  Published Online：15 June 2004，
  
  Published：15 June 2004
- 稿件说明：
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杨晓飞, 张晓辉, 韩昌元. Zemax软件在离轴三反射镜系统计算机辅助装调中的应用[J]. 光学精密工程, 2004,(3): 270-274

YANG Xiao-fei, ZHANG Xiao-hui, HAN Chang-yuan. Application of Zemax software in alignment of three-mirror off-axis aspherical optical system[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 270-274
杨晓飞, 张晓辉, 韩昌元. Zemax软件在离轴三反射镜系统计算机辅助装调中的应用[J]. 光学精密工程, 2004,(3): 270-274 DOI：

YANG Xiao-fei, ZHANG Xiao-hui, HAN Chang-yuan. Application of Zemax software in alignment of three-mirror off-axis aspherical optical system[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 270-274 DOI：

摘要

利用Zemax光学设计软件与自编计算机辅助装调软件

实现了对大口径、长焦距、无中心遮拦离轴三反射镜光学系统的装调.通过Zemax软件模拟光学系统的失调模式

得到整个光学系统的波前像差

把波前像差代入到自编的复杂光学系统计算机辅助装调软件中

计算出光学系统的失调量

与引入的失调量对比

证明了其正确性.在实际的装调过程中

用小型球面干涉仪分别收集3个视场的干涉图

得到失调光学系统的失调量

用Zemax软件验证失调量数据的正确性

从而指导装调.按此方法

在波长λ=632.8nm时

得到离轴三反射镜光学系统的全视场波像差RMS值为0.108λ.该方法也可以运用到其他光学系统中.

Abstract

With the aid of Zemax software

a three-mirror

unobscured

high-resolution optical system with large aperture

long focal length was successfully aligned by first collecting interferograms from several fields of all image plane

and obtaining the wavefront error

namely

obtained wavefront Zernike polynomials; then using the self-made program package to calculate the optical system misalignment. Finally

comparing Zernike polynomial coefficients of ideal optical system with Zernike polynomial coefficients of aligned optical system

and drawing a conclusion about the alignment correction values. It is simple and valid. After alignment

the optical system produced a measured wavefront error across the all image plane of 0.108 waves RMS at λ=632.8 nm.

关键词

Keywords

references

IRA M. EGDAL L. Manufacture of a three-mirror wide-field optical system[J]. Optical Engineering,1985,24(2):285-292.

WU N, ELLERBROEK B L, WILLIAMS S G. Experimental verifications of an image-based alignment technique for optical systems in space[J]. SPIE, 1987, 351:121-130.

FIGOSKI J W, SHRODE T E, MOORE G F. Computer-aided alignment of a wide-field three-mirror, unobscured,high-resolution sensor[J]. SPIE, 1989,1049:166-177.

JOHN W, FIGOSKI J W. Alignment and test results of the QuickBird telescope using the hall optical system test facility[J]. SPIE, 1999,3748: 99-108.

LEIGH D, FREIMAN D. Computer aided optical system with CODE VTM* [J]. SPIE, 1988,1038:288-294.

张斌,张晓晖,韩昌元.光学系统计算机辅助装调中的一种优化算法[J].光学精密工程,2000,8(3):273-277.ZHANG B, ZHANG X H, HAN CH Y. Algorithm for misalignmental determination in computer-aided alignment of optical system[J]. Optics and Precision Engineering,2000,8(3): 273-277.

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