Adaptive correction of multi-range measuring errors of laser resistor trimming machine

WANG Zhi-juan; GUO Xiao-guang; SUN Ji-feng; TANG Jian-hua; YU Qian-yang

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Adaptive correction of multi-range measuring errors of laser resistor trimming machine

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- Adaptive correction of multi-range measuring errors of laser resistor trimming machine
- Optics and Precision Engineering Vol. 12, Issue 3, Pages: 259-264(2004)
- 作者机构：
  
  中国科学院, 长春光学精密机械与物理研究所, 吉林, 长春, 130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN249
- Received：15 December 2003，
  
  Revised：26 January 2004，
  
  Published Online：15 June 2004，
  
  Published：15 June 2004
- 稿件说明：
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王志娟, 郭晓光, 孙继凤, 汤建华, 于前洋. 激光调阻机多档测量误差的软件自适应校正[J]. 光学精密工程, 2004,(3): 259-264

WANG Zhi-juan, GUO Xiao-guang, SUN Ji-feng, TANG Jian-hua, YU Qian-yang. Adaptive correction of multi-range measuring errors of laser resistor trimming machine[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 259-264
王志娟, 郭晓光, 孙继凤, 汤建华, 于前洋. 激光调阻机多档测量误差的软件自适应校正[J]. 光学精密工程, 2004,(3): 259-264 DOI：

WANG Zhi-juan, GUO Xiao-guang, SUN Ji-feng, TANG Jian-hua, YU Qian-yang. Adaptive correction of multi-range measuring errors of laser resistor trimming machine[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 259-264 DOI：

摘要

为了减小激光调阻机测量系统的多档测量误差对阻值修调精度的影响

提出了一种基于有源单臂电桥测量原理自适应地校正激光调阻机多档测量误差的方法.通过测量和标定高精度标准电阻的测量误差

自适应地获取校正激光调阻机多档测量误差的系列修正值

进而用系列修正值对所有待修调电阻的阻值测量误差进行校正

达到进一步减小系统测量误差的目的.实践证明

在测量硬件电路保证高稳定性、微小波动性测量的前提下

应用该方法可使测量系统的精度指标达到:低阻区(R<100Ω)为±0.5‰;中阻区为±0.2‰;高阻区(R≥1MΩ)为±2‰.

Abstract

An adaptive correction method based on the measuring theory of Wheatstone bridge is proposed to reduce the effect of the multi-range measuring errors of a laser resistor trimming machine on the resistance adjusting accuracy. The corrected values in series to be used for correction of multi-range measuring errors of laser resistor trimming machine are adaptively obtained by measuring and calibrating the measuring errors of high precision standard resistors

and they can be used to correct all the resistance measuring errors of resistors to be adjusted to further reduce the system measuring errors. It is proved in practice that if a measuring system has good stability and low fluctuation

the precision of measuring system could be ±0.5‰ in low resistance(R<100 Ω)zone; ±0.2‰ in middle resistance zone; ±2‰ in high resistance(R≥1 MΩ)zone.

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Keywords

references

王家金.激光加工技术[M].北京:中国计量出版社,1992.WANG J J. Laser-processing technology[M]. Beijing: China Metric Press, 1992.(in Chinese)

CABLE A L. Technology review of high-speed, thick film laser trimming[J]. SPIE, 1986,611:2-7.

RAMIREZ J. Characterization, evaluation and comparison of laser-trimmed film resistors[J]. IEEE Journal of Solid-State Circuits, 1987,SC-22(6): 1177-1189.

黄永平.激光调阻机快速实时在线检测系统的研究[D].长春:中国科学院长春光学精密机械与物理研究所,2002.HUANG Y P. Study and design on real-time online measurement and control system of laser resistor trim machine [D]. Changchun: Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences,2002.(in Chinese)

吴家骐,杨东英,钱晋武.空间曲率检测中的标定误差分析及标定方法[J].光学精密工程,2003,11(1):166-170.WU J Q, YANG D Y, QIAN J W. Calibration error analysis and way of calibration for spatial curvature measure ment[J]. Optics and Precision Engineering, 2003,11(1): 166-170.(in Chinese)

黄永平等.有源单臂电桥在激光调阻中的测量原理及实现[J].光学精密工程,2000,8(4):394-397.HUANG Y P. Measurement theory and implementation method of source Wheatstone bridge in laser high-speed resistance trim[J]. Optics and Precision Engineering, 2000, 8(4): 394-397.(in Chinese)

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