Computerized white light scanning interferometer and the application

ZHANG Yi-mo; JING Wen-cai; ZHANG Hong-xia; LI Hai-feng; LI Zhao-hui

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Computerized white light scanning interferometer and the application

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- Computerized white light scanning interferometer and the application
- Optics and Precision Engineering Vol. 12, Issue 6, Pages: 560-565(2004)
- 作者机构：
  
  天津大学, 精密仪器与光电子工程学院, 光电子技术科学教育部重点实验室天津,300072
- 作者简介：
- 基金信息：
- DOI：
  CLC： O436.1
- Received：22 October 2004，
  
  Revised：18 November 2004，
  
  Published Online：15 December 2004，
  
  Published：15 December 2004
- 稿件说明：
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张以谟, 井文才, 张红霞, 李海峰, 李朝辉. 数字化白光扫描干涉仪的研究[J]. 光学精密工程, 2004,(6): 560-565

ZHANG Yi-mo, JING Wen-cai, ZHANG Hong-xia, LI Hai-feng, LI Zhao-hui . Computerized white light scanning interferometer and the application[J]. Editorial Office of Optics and Precision Engineering, 2004,(6): 560-565
张以谟, 井文才, 张红霞, 李海峰, 李朝辉. 数字化白光扫描干涉仪的研究[J]. 光学精密工程, 2004,(6): 560-565 DOI：

ZHANG Yi-mo, JING Wen-cai, ZHANG Hong-xia, LI Hai-feng, LI Zhao-hui . Computerized white light scanning interferometer and the application[J]. Editorial Office of Optics and Precision Engineering, 2004,(6): 560-565 DOI：

摘要

研究并设计实现了微形貌测量白光扫描干涉仪系统和光纤偏振耦合点监测白光扫描干涉仪系统.前者采用Mirau相移干涉形式

用压电陶瓷传感器PZT作移项器

主要用于微形貌测量

精度可达nm量级.后者采用光路补偿白光Michelson干涉形式

用格兰棱镜对偏振态进行调整控制

用移动参考臂来补偿由于耦合点所造成的光程差

光纤寄生偏振耦合测试仪的空间分辨率达到50mm

测量范围达到1km

探测灵敏度不小于-80dB(耦合模式与主模式的功率比).

Abstract

The instrumentation principles and designing of two kinds of white light scanning interferometer systems are studied. One

based on the two-beam Mirau phase-shifting interferometer and the PZT used as a phase shifter

is developed to measure the micro-profile with nanometer accuracy. The other

employing Michelson interferometer for light path compensation

with the polarization states adjusted and controlled by rotating a Glan prism

and by varying reference arm to compensate the difference of light path induced by polarization coupling point

is developed to measure the position of polarization coupling pointing optical fiber. The results are that the spatial resolution of autoecious Polarization coupling measuring apparatus is 50mm

the measure range is 1km

and the detection sensitivity is better than -80 dB.

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references

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