Highly sensitive micromachined tunneling sensors

XUE Wei; WANG Jing; CUI Tian-hong

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Highly sensitive micromachined tunneling sensors

更新时间：2020-08-12

- Highly sensitive micromachined tunneling sensors
- Optics and Precision Engineering Vol. 12, Issue 5, Pages: 491-503(2004)
- 作者机构：
  
  美国明尼苏达大学, 机械工程系和纳米加工研究中心
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212.1
- Received：16 March 2004，
  
  Revised：27 June 2004，
  
  Published Online：15 October 2004，
  
  Published：15 October 2004
- 稿件说明：
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薛伟, 王晶, 崔天宏. 基于MEMS微加工技术的高灵敏度隧道传感器的研究[J]. 光学精密工程, 2004,(5): 491-503

XUE Wei, WANG Jing, CUI Tian-hong . Highly sensitive micromachined tunneling sensors[J]. Editorial Office of Optics and Precision Engineering, 2004,(5): 491-503
薛伟, 王晶, 崔天宏. 基于MEMS微加工技术的高灵敏度隧道传感器的研究[J]. 光学精密工程, 2004,(5): 491-503 DOI：

XUE Wei, WANG Jing, CUI Tian-hong . Highly sensitive micromachined tunneling sensors[J]. Editorial Office of Optics and Precision Engineering, 2004,(5): 491-503 DOI：

摘要

基于硅加工的高灵敏微型隧道传感器在过去15年里得到了充分的发展.多种隧道传感器被开始出来

例如加速度计

角速度计

红外传感器

磁性传感器等.首先对基于硅加工的隧道传感进行了简单的总结.对四种传感器进行了总结和讨论

包括几种器件的结构设计

加工过程

器件性能

控制电路和系统噪音.特别介绍了一种新型的基于高分子聚合物的隧道加速度计

并讨论了其结构

加工与测试

隧道效应得到了进一步验证.同时给出了这种新型高灵敏传感器在很多领域的应用展望.

Abstract

Highly sensitive silicon micromachined tunneling sensors with small size and light mass have been widely explored in the last 15 years. Many types of tunneling sensors have been developed. This paper presents a review of silicon micromachined tunneling sensors. Four types of tunneling sensors including accelerometers

gyroscopes

infrared sensors

and magnetic sensors are reviewed. Various designs

fabrication procedures

performance

control systems

and noise constraints of silicon tunneling sensors are described and discussed. Novel polymer-based tunneling accelerometers fabricated by PMMA and hot embossing technique are introduced. The structure

fabrication process and characterization of the polymer-based sensor are presented. We can expect that the polymer tunneling sensor has the potential to become the basis for the next generation of highly sensitive MEMS-based sensors in many areas.

关键词

Keywords

references

BINNING G,ROHRER H.Scanning tunneling microscopy, an atomic probe[C]. Scanning Electron Microscopy, Proceeding of the Annual Scanning Electron Microscope Symposium, 1983:1079-1082.

LIU C H,KENNY T W.A high-precision, wide-bandwidth micromachined tunneling accelerometer[J].Journal of Microelectromechanical Systems,2001,10(3):425-433.

KUBENA R L,ATKINSON D M,ROBINSON W P,et al.A new miniaturized surface micromachined tunneling accelerometer[J]. IEEE Electron Device Letters, 1996,17(6):306-308.

LIU C H,BARZILAI A M,REYNOLDS J K, et al.Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution[J]. Journal of Microelectromechanical System, 1998,7(2):235-244.

KUBENA R L,VICKERS-KIRBY D J,JOYCE R J, et al. New tunneling-based sensor for inertial rotation rate measurements[J]. Sensors and Actuators, A: Physical, 2000,83(1):109-117.

KENNY T W,REYNOLDS J K,PODOSEK J A,et al. Micromachined infrared sensors using tunneling displacement transducers[J]. The Review of Scientific Instruments, 1996,67(1):112-128.

DILELLA D,WHITMAN L J,COLTON R J,et al.A micromachined magnetic-field sensor based on an electron tunneling displacement transducer[J]. Sensors and Actuators, A: Physical,2000,86(1-2):8-20.

WANDASS J H,MURDAY J S,COLTON R J.Magnetic field sensing with magnetostrictive materials using a tunneling tip detector[J]. Sensors and Actuators, 1989,19:211-225.

NAVID Y, FARROKH A, KHALIL N.Micromachined inertial sensors[C]. Proceedings of the IEEE, 1998,86(8):1640-1659.

WALTMAN S B,KAISER W J.An electron tunneling sensor[J]. Sensors and Actuators,1989,19:201-210.

LIU C H,REYNOLDS J K,PARTRIDGE A,et al.High-bandwidth feedback control of micromachined tunneling sensors[C].Proceedings of the ASME Dynamic Systems and Control Division,1995:1001-1010.

CHINGWEN Y,KHALIL N. A low-voltage bulk-silicon tunneling-based silicon microaccelerometer [M]. Technical Digest - International Electron Devices Meeting, 1995:593-596.

GRADE J,BARZILAI A,REYNOLDS J K,et al. Wafer-scale processing, assembly, and testing of tunneling infrared detectors[C]. 1997 International Conference on Solid-State Sensors and Actuators, Chicago, 1997: 1241-1244.

CHINGWEN Y,KHALIL N.A low-voltage tunneling-based silicon microaccelerometer[J]. IEEE Transactions on Electron Devices,1997,44(11):1875-1882.

CHINGWEN Y,KHALI N.CMOS interface circuity for a low-voltage micromachined tunneling accelerometer[J]. Journal of Microelectromechanical Systems, 1998,7(1):6-15.

KUBENA R L,ATKINSON G M,ROBINSON W P,et al.A new high-performance surface-micromachined tunneling accelerometer fabricated using nanolithography[J].Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena,1996,14(6):4029-4033.

DAI K,TOSHIKI H,TOMOTAKE F,et al.An integrated lateral tunneling unit[C]. Proceeding of IEEE Micro Electro Mechanical Systems Workshop, 1992:214-219.

HARTWELL P G,BERTSCH F M,MILLER S A,et al.Single mask lateral tunneling accelerometer[C].Proceedings of the 1998 IEEE 11th Annual International Workshop on Micro Electro Mechanical Systems, 1998:340-344.

KUBENA R L,VICKERS-KIRBY D J,JOYCE R J, et al.A new tunneling-based sensor for inertial rotation rate measurements[J]. Journal of Microelectromechanical Systems,1999,8(4):439-447.

WILLARDSON R K,BEER A C. Semiconductors and semimetals [M].Infrared Detectors, Academic Press, 1970

KRUSE P W,SKATRUD D D. Semiconductors and semimetals [M].Uncooled Infrared Imaging Arrays and Systems, Academic Press, 1997.

GOLAY M J E.Theoretical consideration in heat and infra-red detection, with particular reference to the Pneumatic Detector[J]. The Review of Scientific Instruments, 1947,18(5):347-356.

GOLAY M J E.A Pneumatic Infra-Red Detector[J]. The Review of Scientific Instruments, 1947,18(5):357-362.

KENNY T W,KAISER W J,WALTMAN S B, et al.Novel infrared detector based on a tunneling displacement transducer[J]. Applied Physics Letters, 1991,59(15):1820-1822

KENNY T W,KAISER W J,PODOSEK J A,et al. Micromachined electron tunneling infrared sensors [M]. Technical Digest-IEEE Solid-State Sensor and Actuator Workshop, 1992:174-177.

PARTRIDGE A,REYNOLDS J K,GRADE J D, et al.An integrated controller for tunnel sensors[J].Journal of Microelectromechanical Systems, 1999,34(8):1099-1107.

SEUNG S L,TAKAHITO O,KAZUHIRO N.Electrostatic servo controlled uncooled infrared transducer[J]. Sensors and Actuators, 2000,12(5):301-314.

BRIZZOLARA R A,COLTON R J,WUN-FOGLE M, et al.A tunneling-tip magnetometer[J].Sensors and Actuators, 1989,20:199-205.

BRIZZOLARA R A,COLTON R J.Magnetostriction measurements using a tunneling-tip strain detector[J]. Journal of Magnetism and Magnetic Materials, 1990,88:343-350.

BRIZZOLARA R A,COLTON R J.The magnetostriction of CoFeNiMo metallic glasses measured with a tunneling transducer[J]. Journal of Magnetism and Magnetic Materials,1992,103:111-116.

WITEK A,ONN D G.Proposal for a novel magnetometer[J].Journal of Vacuum Science and Technology,1991,9:639-642.

MILLER L M,PODOSEK J A,KRUGLICK E,et al.A μ-magnetometer based on electron tunneling[C].Proceedings of the IEEE Microelectromechanical Systems (MEMS), 1996:467-472.

LIU C H,ROCKSTAD H K,KENNY T W.Robust controller design via μ-Synthesis for High-performance micromachined tunneling accelerometers[C]. Proceeding of the American Control Conference, San Diego, California, 1999,4:247-252.

JOHN G,AARON B,REYNOLDS J K,et al. Low frequency drift in tunnel sensors[C]. International Conference on Solid-State Sensors and Actuators, Chicago, 1997,4: 16-19.

HOLGER B,U1F H.Hot embossing as a method for the fabrication of polymer high aspect ratio structures[J]. Sensors and Actuators, A: Physical, 2000,8(1):130-135.

MARC J,MADOU L,JAMES L, et al.Design and fabrication of CD-like microfluidic platforms for diagnostics: microfluidic functions[J]. Biomedical Microdevices,2001,3(4):245-254.

LEE G B,CHEN SH H,HUANG G R,et al. Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection[J]. Sensors and Actuators, B: Chemical, 2001,75(1-2):142-148.

WANG J,XUE W,CUI T H.A combinative technique to fabricate hot embossing master for PMMA tunneling sensors[J]. Microsystem Technologies,2004,10(4):329-333.

WANG J,ZHAO Y J,CUI T H,et al.Synthesis of the modeling and control systems of a tunneling accelerometer using the MatLab simulation[J]. Journal of Micromechanics and Microengineering,2002,12(6):730-735.

WANG J. Vertical polymer tunneling sensor platform by hot embossing technique [D]. Ph.D. Dissertation, Institute for Micromanufacturing, Louisiana Tech University, 2003.

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